Improving the dielectric losses of (Ba,Sr)TiO3 thin films using a SiO2 buffer layer

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1085-1087

  Reymond, V ^a   Michau, D ^a   Payan, S ^a   Maglione, M ^a  

^a INST CHIM MATIERE COND BORDEAUX   (France)

Author keywords

(Ba, Sr)TiO3; C. Dielectric properties; D. Silicon oxide

Indexed keywords

CERAMIC MATERIALS; DIELECTRIC LOSSES; ELECTRONIC EQUIPMENT; MAGNETRON SPUTTERING; PHASE SHIFT; TITANIUM OXIDES;

ELECTRONIC INDUSTRY; SILICON OXIDE; TIO3;

SILICA;

EID: 4344580482     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.024     Document Type: Conference Paper

References (14)

1. 3 ceramic films and phase-shifters on their base. Integr. Ferroelectrics. 34:2001;189.
2. Serraiocco J., Acikel B., Hansen P., Taylor T., Xu H., Speck J.S., York R.A. Tunable passive integrated circuits using BST thin films. Integr. Ferroelectrics. 49:2002;161.
3. 3+z thin films and integration into microwave varactors and phase shifters. Integr. Ferroelectrics. 34:2001;177.
4. T. Mitsui, Landolt-Börnstein, Vol. 3, Ferro- and Antiferroelectric Substances, Springer-Verlag, Berlin, 1969.
5. 3 thin film prepared by pulsed-laser deposition. Thin Solid Films. 406:2002;200.
6. 3/Pt film capacitors. J. Appl. Phys. 92(1):2002;421.
7. 3 thin film capacitor structure. Appl. Phys. Lett. 80(21):2002;4003.
8. 3 thin films. Jpn. J. Appl. Phys. 37:1998;6472.
9. 3 systems. J. Electroceram. 9:2002;17.
10. Sengupta L.C., Stowell S., Ngo E., O'Day M.E. Barium strontium titanate and non-ferroelectric oxide ceramic composites for use in phase array antennas. Integr. Ferroelectrics. 8:1995;77.
11. Huber C., Treguer-Delapierre M., Ellisalde C., Weill F., Maglione M. New application of the core-shell concept to ferroelectric nanopowders. J. Mater. Chem. 13(4):2003;650.
12. 3/MgO thin film composites for tunable microwave devices. Mater. Lett. 57:2003;4232.
13. C. Huber, Thesis, University of Bordeaux 1, Order No. 2717, 2003.
14. 3 films. Eur. Phys. J. Appl. Phys. 9(3):2000;181.