The spatial thickness distribution of metal films produced by large area pulsed laser deposition

Applied Surface Science

Volumn 253, Issue 19, 2007, Pages 8231-8234

  Pryds, Nini ^a   Schou, Jørgen ^a   Linderoth, Søren ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Plume; Plused laser deposition; Pressure

Indexed keywords

ANGULAR DISTRIBUTION; FILM THICKNESS; METALLIC FILMS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

GLASS SUBSTRATES; METAL LAYERS; RECTANGULAR BEAMS;

THIN FILMS;

EID: 34447300436     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.137     Document Type: Article

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