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Volumn 33, Issue 1-2, 1997, Pages 97-100

Low temperature deposition of Ba0.4Sr0.6TiO3 thin films on LaNiO3-buffered electrode by rf magnetron sputtering

Author keywords

Ba0.4Sr0.6TiO3; Electrode; Films; LaNio3; Large dielectric constant; Leakage current; Magnetron; Sputtering

Indexed keywords

BARIUM COMPOUNDS; CONDUCTIVE FILMS; CRYSTAL ORIENTATION; ELECTRIC RESISTANCE; ELECTRODES; LANTHANUM COMPOUNDS; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; PERMITTIVITY; PEROVSKITE; SPUTTER DEPOSITION; THIN FILMS;

EID: 0031273157     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(97)00083-9     Document Type: Article
Times cited : (25)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.