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Volumn 33, Issue 1-2, 1997, Pages 97-100
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Low temperature deposition of Ba0.4Sr0.6TiO3 thin films on LaNiO3-buffered electrode by rf magnetron sputtering
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Author keywords
Ba0.4Sr0.6TiO3; Electrode; Films; LaNio3; Large dielectric constant; Leakage current; Magnetron; Sputtering
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Indexed keywords
BARIUM COMPOUNDS;
CONDUCTIVE FILMS;
CRYSTAL ORIENTATION;
ELECTRIC RESISTANCE;
ELECTRODES;
LANTHANUM COMPOUNDS;
LEAKAGE CURRENTS;
MAGNETRON SPUTTERING;
PERMITTIVITY;
PEROVSKITE;
SPUTTER DEPOSITION;
THIN FILMS;
BARIUM STRONTIUM TITANATE;
DIELECTRIC FILMS;
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EID: 0031273157
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(97)00083-9 Document Type: Article |
Times cited : (25)
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References (13)
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