A model for electrostatic actuation in conducting liquids

Journal of Microelectromechanical Systems

Volumn 18, Issue 5, 2009, Pages 1105-1117

  Panchawagh, Hrishikesh V ^a,b   Sounart, Thomas L ^c,d   Mahajan, Roop L ^e  

^a UCB 450   (United States)

^b EASTMAN KODAK COMPANY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d INTEL CORPORATION   (United States)

^e State University   (United States)

Author keywords

Electrode polarization; Electrolysis; Microelectromechanical systems (MEMS); Microfluidics; Passivation

Indexed keywords

ACTUATOR DESIGN; ACTUATOR DISPLACEMENT; AQUEOUS ELECTROLYTE; BIOLOGICAL MEDIA; COMBDRIVE; CONDUCTING LIQUID; CRITICAL FREQUENCIES; DEVICE PARAMETERS; DOUBLE LAYERS; ELECTRODE POLARIZATION; ELECTROSTATIC ACTUATION; EXPERIMENTAL OBSERVATION; FREQUENCY DEPENDENT; GENERALIZED MODELS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED; MODEL RESULTS; PARALLEL-PLATE ACTUATORS; PULL-IN INSTABILITY; UPPER BOUND;

ACTUATORS; COMPOSITE MICROMECHANICS; DYNAMIC RESPONSE; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMISTRY; ELECTROLYSIS; ELECTROSTATICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; PASSIVATION; POLARIZATION;

ELECTROSTATIC ACTUATORS;

EID: 70349987624     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2025552     Document Type: Article

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