Characterization of silicon parallel-plate electrostatic actuator in partially conducting aqueous solution

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 495-498

  Panchawagh, Hrishikesh V ^a   Sounart, Thomas L ^b   Kausik, Aditya ^a   Finch, Dudley S ^a,c   Mahajan, Roop L ^a,c,d,e  

^a UCB 450   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^d Department of Engineering Science and Mechanics ^*  (United States)

^e State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTROSTATICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NONMETALS; PLATES (STRUCTURAL COMPONENTS); POLYSILICON; REACTIVE ION ETCHING; SILICON; SOLUTIONS; SURFACE CHARGE;

ACTUATOR DESIGN; AQUEOUS SOLUTIONS; CHARGE MIGRATION; DRIVE SIGNALS; DYNAMIC MEASUREMENTS; EXPERIMENTAL SET UPS; FLUID PROPERTIES; HIGH FREQUENCIES; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; PARALLEL PLATES; PARALLEL-PLATE ACTUATORS; PISTON ACTUATORS; PLATE MOTIONS; POSITION SENSORS; PULL-IN;

ELECTROSTATIC ACTUATORS;

EID: 50149092270     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443701     Document Type: Conference Paper

References (9)

1. E. Verpoorte and N. F. De Rooij, "Microfluidics meets MEMS," Proc. IEEE, vol. 91, pp. 930-953, 2003.
2. D. L. Polla, A. G. Edman, W. P. Robbins, D. T. Marcus, J. Diaz-Diaz, R. Rizq, Y. Nam, and H. T. Brickner, "Microdevices in medicine," Annu. Rev. Biomed. Eng., vol. 2, pp. 551-576, 2000.
3. G. T. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, Boston, MA, 1998.
4. K. R. Zavadil, M. A. Rising, and P. C. Galambos, "Limits of electrochemical processes at Si electrodes used at high field for aqueous microfluidic MEMS applications," Proc. Electrochemical Society Microfabricated Systems and MEMS VI, Series PV2002-6, Pennington, NJ, pp. 144-152, 2002.
5. D. Sameoto, T. Hubbard, M. Kujath, "Operation of electrothermal and electrostatic MUMPs microactuators underwater, " J. Micromech. Microeng., vol. 14, pp. 1359-1366, 2004.
6. T. L. Sounart, T. A. Michalske, and K. R. Zavadil, "Frequency- dependent electrostatic actuation in microfluidic MEMS," J. Microelectromech. Syst., vol. 14, pp. 125-133, 2005.
7. A. -S. Rollier, B. Legrand, D. Collard, and L. Buchaillot, "The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions" J. Micromech. Microeng., vol. 16, pp. 794-801, 2006.
8. J. Zhang, Y. C. Lee, A. Tuantranont, and V. M. Bright, "Thermal Analysis of Micromirrors for High-Energy Applications" 2001, IEEE Trans. Adv. Pack., vol. 26 (3), pp. 310-317, 2003.
9. N. Scuor, P. Gallina, O. Sbaizero, H. V. Panchawagh and R. L. Mahajan, "Dynamic characterization of MEMS cantilevers in liquid environment using a low-cost optical system," Meas. Sci. Technolo., vol. 17, 173-180, 2006