Operation of electrothermal and electrostatic MUMPs microactuators underwater

Journal of Micromechanics and Microengineering

Volumn 14, Issue 10, 2004, Pages 1359-1366

  Sameoto, Dan ^a   Hubbard, Ted ^a   Kujath, Marek ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARKING; MICROMACHINING; NATURAL FREQUENCIES; PROBLEM SOLVING; TRANSDUCERS; UNDERWATER EQUIPMENT;

AIR PERFORMANCE; FORCE TRANSDUCER; ROOT MEAN SQUARE (RMS) OPERATION; UNDERWATER OPERATIONS;

MICROACTUATORS;

EID: 7044222924     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/10/010     Document Type: Article

References (22)

1. Koester D A, Mahadevan R, Hardy B and Markus K 2001 MUMPs Design Handbook revision 7.0 (Research Triangle Park, NC: Cronos Integrated Microsystems)
2. Lin G, Pister K S J and Roos K P 2000 Surface micromachined polysilicon heart cell force transducer Microelectromech. Syst. J. 9 9-17
3. Dhuler V R et al 1992 Micromotor operation in a liquid environment Technical Digest, IEEE Solid-State Sensor and Actuator Workshop pp 10-3
4. Ok J et al 1999 Pneumatically driven microcage for micro-objects in biological liquid 12th IEEE International Conf, on MEMS (17-21 Jan. 1999) pp 459-63
5. Jager E W H, Inganas O and Lundstrom I 2000 Microrobots for micrometer-size objects in aqueous media: potential tools for single-cell manipulation Science 288 2335-8
6. Okandan M et al 2001 Development of surface micromachining technologies for microfluidics and BioMEMS SPIE Micromachining and Microfabrication Conf. (San Francisco, CA, Oct. 2001)
7. Chan H and Li W 2003 A thermally actuated polymer micro robotic gripper for manipulation of biological cells, IEEE Conf. on Robotics and Automation (14-19 Sept. 2003) pp 288-93
8. Hickey R et al 2002 Analysis and optimization of two-beam MEMS thermal actuators J. Vac. Sci. Technol. A 20 971-4
9. Huang Q et al 1999 Analysis and designs of polysilicon thermal flexure actuators J. Micromech. Microeng. 9 64-70
10. Que L, Park J-S and Gianchandani Y B 1999 Bent-beam electro-thermal actuators for high force applications 12th IEEE International Conf. on Micro Electro Mechanical Systems, 1999 (MEMS'99) (17-21 Jan. 1999) pp 31-6
11. Geisberger A A et al 2003 Electrothermal properties and modeling of polysilicon microthermal actuators Microelectromech. Syst. J. 12 513-23
12. Tang W C 1990 Electrostatic comb drive for resonant sensor and actuator applications Dissertation University of California at Berkeley
13. Tang W C et al 1989 Laterally driven polysilicon resonant microstructures, Micro Electro Mechanical Systems, 1989: Proc. an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE, 20-22 Feb. 1989) pp 53-9
14. Grade J D et al 2003 Design of large deflection electrostatic actuators Microelectromech. Syst. J. 12 335-43
15. Chu P B and Pister S J 1994 Analysis of closed-loop control of parallel-plate electrostatic microgrippers Proc. 1994 IEEE International Conf. on Robotics and Automation (8-13 May 1994) vol 1 pp 820-5
16. Sniegowski J J and Smith C 1995 An application of mechanical leverage to microactuation TRANSDUCERS'95 EUROSENSORSIX (Stockhom, Sweden, 25-29 June 1995) pp 364-7
17. Seeger J I and Boser B E 1999 Dynamics and control of parallel-plate actuators beyond the electrostatic instability TRANSDUCERS'99 (Sendai, Japan, 7-9 June 1999) pp 474-7
18. Zumdahl S S 1995 Chemical Principles 2nd edn (DC: Heath and Company) pp 477-8
19. Hickey R et al 2003 Time and frequency response of two-arm micromachined thermal actuators J. Micromech. Microeng. 1340-6
20. Incropera F, DeWitt P and D P 1996 Introduction to Heat Transfer 3rd edn (New York: Wiley) pp 757, 764
21. Selvaganapathy P et al 2002 Bubble-free electrokinetic pumping J. Microelectromech. Syst. 11448-53
22. Weast R C (ed) 1975-1976 Handbook of Chemistry and Physics 56th edn (Boca Raton, FL: Chemical Rubber Company) p E-61