A parametric dynamic compact thermal model of an electrothermally actuated micromirror

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Pal, Sagnik ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR ROTATIONS; COMPACT THERMAL MODELS; DYNAMIC COMPACT THERMAL MODELS; FINITE ELEMENT; FINITE ELEMENT MODELS; KRYLOV SUBSPACE; LUMPED-ELEMENT CIRCUIT MODEL; MICRO MIRROR; MICROMIRROR DEVICES; ORDER 2; PLATINUM RESISTORS; REDUCED MODEL; REDUCED ORDER MODELS; SECOND ORDERS; THERMAL MODEL; THERMAL RESPONSE; THERMAL-IMAGING DATA;

PLATINUM; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

FINITE ELEMENT METHOD;

EID: 70349970170     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065007     Document Type: Article

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