A parametric dynamic compact thermal model of an electrothermally actuated micromirror

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Pal, Sagnik ^a   Xie, Huikai ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR ROTATIONS; COMPACT THERMAL MODELS; DYNAMIC COMPACT THERMAL MODELS; FINITE ELEMENT; FINITE ELEMENT MODELS; KRYLOV SUBSPACE; LUMPED-ELEMENT CIRCUIT MODEL; MICRO MIRROR; MICROMIRROR DEVICES; ORDER 2; PLATINUM RESISTORS; REDUCED MODEL; REDUCED ORDER MODELS; SECOND ORDERS; THERMAL MODEL; THERMAL RESPONSE; THERMAL-IMAGING DATA;

PLATINUM; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

FINITE ELEMENT METHOD;

EID: 70349970170     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065007     Document Type: Article

References (30)

1. Wu L and Xie H 2007 A lateral-shift-free and large-vertical- displacement electrothermal actuator for scanning micromirror/lens IEEE Transducers 2007 (Lyon, France, June 10-14, 2007)
2. Todd S T and Xie H 2008 An electrothermomechanical lumped element model of an electrothermal bimorph actuator J. Microelectromech. Syst 17 213-25
3. Pal S, Jia K, Maley S and Xie H Reduced-order thermal modeling of a one-dimensional electrothermally actuated micromirror device SPIE Photonics West Conf. (San Jose, CA, 19-24 January, 2008)
4. Henning A K 2006 Comprehensive model for thermopneumatic actuators and microvalves J. Microelectromech. Syst. 15 1308-18
5. Girbau D, Pradeu L, Lazaro A and Nebot 2007 Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate J. Microelectromech. Syst. 16 1061-70
6. Palacin J, Salleras M, Puig M, Samitier J and Marco S 2004 Evolutionary algorithms for compact modeling of microsystems: application to a micro-pyrotechnic actuator J. Micromech. Microeng. 14 1074-82
7. Bechtold T, Rudnyi E B and Korvink J G 2005 Dynamic electro-thermal simulation of Microsystems-a review J. Micromech. Microeng. 15 R17-R31
8. Yang Y and Shen K 2005 Nonlinear heat-transfer macromodeling for MEMS thermal devices J. Micromech. Microeng. 15 408-18
9. Bechtold T 2005 Model order reduction of electro-thermal MEMS PhD Thesis dissertation University of Freiburg, Germany
10. Batty W, Christoffersen C E, Panks A J, David S, Snowden C M and Steer M B 2001 Electrothermal CAD of power devices and circuits with fully physical time-dependent compact thermal modeling of complex nonlinear 3D systems IEEE Trans. Compon. Packag. Technol. 24 566-90 (Pubitemid 34091925)
11. Pesare M, Giorgio A and Perri A G 2001 Optimized electrothermal design of integrated devices through the solution to the non-linear 3D heat flow equation Microelectron. J. 32 823-31
12. Székely V 1991 On the representation of infinite-length distributed RC one-ports IEEE Trans. Circuits Syst. 38 711-19
13. Székely V and Rencz M 2000 Thermal dynamics and the time constant domain IEEE Trans. Compon. Packag. 23 587-94
14. Hocine R, Stambouli M A B and Saidane A 2002 A three-dimesional TLM simulation method for thermal effect in high power insulated gate bipolar transistors 18th IEEE SEMI-THERM Symp. pp 99-104
15. Christiaens F, Vandevelde B, Beyne E, Mertens R and Berghmans J 1998 A generic methodology for deriving compact dynamic thermal models, applied to the PSGA package IEEE Trans. Compon. Packag. Manuf. Technol. A 21 565-76
16. Manginell R P 1997 Polycrystalline-silicon microbridge combustible gas sensor PhD dissertation University of New Mexico, Albuquerque
17. Olsson K H A 2002 Model order reduction in FEMLAB by dual rational Arnoldi Thesis for the degree of Licentiate in Engineering, Department of Mathematics, Göteborg University, Sweden
18. Rudnyi E B and Korvink J G 2002 Review: automatic model reduction for transient simulation of MEMS-based devices Sensors Update vol 11 (New York: Wiley) pp 3-33 issue 1
19. Lewis R W, Nithiarasu P and Seetharamu K N 2004 Fundamentals of Finite Element Method for Heat and Fluid Flow (West Sussex: Wiley)
20. Wu L and Xie H 2007 A 124 degree rotation angle electro-thermal micromirror with integrated platinum heater IEEE J. Sel. Top. Quantum Electron. 13 316-21
21. Hsu J T and Quoc L V 1996 A rational formulation for thermal circuit models for electrothermal simulation: part I. Finite element method IEEE Trans. Circuits Syst. I 43 721-32
22. Timoshenko S 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11 233-56
23. Feng X, Jain A, Pal S, Nishida T and Xie H 2007 LVD micromirror for rapid reference scanning in optical coherence tomography Proc. SPIE Photonics West 2007 (San Jose, CA, 20-25 January 2007)
24. Lee K, Voorde P V, Varon M and Nishi Y 1987 A method to reduce the peak current density in a via Int. Electron Devices Meeting 33 510-13
25. Beadle W E, Tsai J C C and Plummer R D 1985 Quick Reference Manual for Silicon Integrated Circuit Technology (New York: Wiley)
26. Lee S M and Cahill D G 1997 Heat transport in thin dielectric films J. Appl. Phys. 81 2590-95
27. Stojanovic N, Jongsin Y, Washington E B K, Berg J M, Holtz M W and Temkin H 2006 Thin-film thermal conductivity measurement using microelectrothermal test structures and finite-element-model-based data analysis J. Microelectromech. Syst. 16 1269-75
28. Terada Y, Ohkubo K and Mohri T 2005 Thermal conductivities of platinum alloys at high temperatures Platinum Met. Rev. 49 21-6
29. Varga A 2000 Model reduction software in the SLICOT library Applied and Computational Control, Signals and Circuits vol 629 (Dordrecht: Kluwer)
30. Barin I and Knacke O 1973 Thermomechanical Properties of Inorganic Substances (New York: Springer)