A lateral-shift-free and large-vertical-displacement electrothermal actuator for scanning micromirror/lens

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1075-1078

  Wu, L ^a   Xie, H ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

Confocal imaging; Electrothermal bimorph actuator; Large vertical displacement (LVD); Lateral shift free (LSF); Microlens; Micromirror

Indexed keywords

ELECTRIC HEATING; ELECTROSTATIC ACTUATORS; MICROACTUATORS; MICROMACHINING; MICROSYSTEMS; NATURAL FREQUENCIES; OPTICAL DESIGN; PROCESS ENGINEERING; SENSORS; TRANSDUCERS;

ACTUATOR DESIGN; BULK MICRO-MACHINING; COMBINED SURFACE; CONFOCAL IMAGING; ELECTRO-THERMAL ACTUATORS; ELECTROTHERMAL BIMORPH ACTUATOR; INTERNATIONAL CONFERENCES; LARGE VERTICAL DISPLACEMENT (LVD); LARGE-VERTICAL-DISPLACEMENT; LATERAL SHIFT FREE (LSF); LATERAL SHIFTING; MICRO LENSING; MICRO MIRRORS; MICROLENS; MICROMIRROR; RESONANCE MODES; RESONANT FREQUENCIES; SOLID-STATE SENSORS; TILTING ANGLES; VERTICAL DISPLACEMENTS; VERTICAL MOTIONS;

ACTUATORS;

EID: 50049117213     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300320     Document Type: Conference Paper

References (10)

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