SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 5, 2009, Pages 2238-2241

Luminescence mechanisms in Si quantum dots- Si Nx nanocomposite structures

(5) Rezgui, B́chir a Sibai, Abel a Nychyporuk, Tetyana a Lemiti, Mustapha a Bŕmond, Georges a

a UNIVERSITÉ DE LYON (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; CHEMICAL COMPOSITIONS; IN-SITU; LUMINESCENCE MECHANISMS; NANO-COMPOSITE STRUCTURE; PHOTOLUMINESCENCE MEASUREMENTS; PHOTOLUMINESCENCE PEAK; REACTANT GAS; SI QUANTUM DOT; SI-BASED; SILICON CLUSTERS; SILICON NITRIDE FILM; SILICON QUANTUM DOTS; SILICON SUBSTRATES; TANDEM SOLAR CELLS;

ABSORPTION SPECTROSCOPY; INFRARED SPECTROSCOPY; LIGHT EMISSION; OPTICAL CORRELATION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PHOTOVOLTAIC CELLS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SEMICONDUCTOR QUANTUM DOTS; SILANES; SILICON NITRIDE; STRUCTURE (COMPOSITION);

AMORPHOUS SILICON;

EID: 70349667458 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3225601 Document Type: Article

Times cited : (12)

References (25)

1
- 0141775174
- 10.1063/1.103561
- L. T. Canham, Appl. Phys. Lett. 57, 1046 (1990). 10.1063/1.103561
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1046
- Canham, L.T.¹

2
- 53849121231
- 10.1016/j.jlumin.2008.08.007
- C. Dufour, S. Chausserie, and F. Gourbilleau, J. Lumin. 129, 73 (2009). 10.1016/j.jlumin.2008.08.007
- (2009) J. Lumin. , vol.129 , pp. 73
- Dufour, C.¹ Chausserie, S.² Gourbilleau, F.³

3
- 33745036683
- Light emission efficiency and dynamics in silicon-rich silicon nitride films
- DOI 10.1063/1.2208378
- L. D. Negro, J. H. Yi, J. Michel, L. C. Kimerling, T.-Y. F. Chang, V. Sukhovatkin, and E. H. Sargent, Appl. Phys. Lett. 88, 233109 (2006). 10.1063/1.2208378 (Pubitemid 43877761)
- (2006) Applied Physics Letters , vol.88 , Issue.23 , pp. 233109
- Dal Negro, L.¹ Yi, J.H.² Michel, J.³ Kimerling, L.C.⁴ Chang, T.-W.F.⁵ Sukhovatkin, V.⁶ Sargent, E.H.⁷

4
- 34047157653
- Photoluminescence of Si-rich silicon nitride: Defect-related states and silicon nanoclusters
- DOI 10.1063/1.2717014
- M. Wang, D. Li, Z. Yuan, D. Yang, and D. Que, Appl. Phys. Lett. 90, 131903 (2007). 10.1063/1.2717014 (Pubitemid 46516847)
- (2007) Applied Physics Letters , vol.90 , Issue.13 , pp. 131903
- Wang, M.¹ Li, D.² Yuan, Z.³ Yang, D.⁴ Que, D.⁵

5
- 33644918010
- K. M. Cha, Y. D. Kim, J. H. Kang, J.-Y. Yi, H. J. Bark, T. H. Chung, and Y. Kim, J. Korean Phys. Soc. 48, 297 (2006).
- (2006) J. Korean Phys. Soc. , vol.48 , pp. 297
- Cha, K.M.¹ Kim, Y.D.² Kang, J.H.³ Yi, J.-Y.⁴ Bark, H.J.⁵ Chung, T.H.⁶ Kim, Y.⁷

6
- 33847205658
- Ultrafast carrier dynamics of Si quantum dots embedded in SiN matrix
- DOI 10.1063/1.2695977
- L. V. Dao, J. Davis, P. Hannaford, Y.-H. Cho, M. A. Green, and E.-C. Cho, Appl. Phys. Lett. 90, 081105 (2007). 10.1063/1.2695977 (Pubitemid 46310328)
- (2007) Applied Physics Letters , vol.90 , Issue.8 , pp. 081105
- Van Dao, L.¹ Davis, J.² Hannaford, P.³ Cho, Y.-H.⁴ Green, M.A.⁵ Cho, E.-C.⁶

7
- 0035938373
- 10.1063/1.1367277
- N. M. Park, T. S. Kim, and S. J. Park, Appl. Phys. Lett. 78, 2575 (2001). 10.1063/1.1367277
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2575
- Park, N.M.¹ Kim, T.S.² Park, S.J.³

8
- 0345359253
- 10.1063/1.1621462
- Y. Q. Wang, Y. G. Wang, L. Cao, and Z. X. Cao, Appl. Phys. Lett. 83, 3474 (2003). 10.1063/1.1621462
- (2003) Appl. Phys. Lett. , vol.83 , pp. 3474
- Wang, Y.Q.¹ Wang, Y.G.² Cao, L.³ Cao, Z.X.⁴

9
- 49549113388
- 10.1002/pssc.200674144
- J.-F. Lelìvre, Phys. Status Solidi C 4, 1401 (2007). 10.1002/pssc.200674144
- (2007) Phys. Status Solidi C , vol.4 , pp. 1401
- Lelìvre, J.-F.¹

10
- 34248574603
- x film
- DOI 10.1016/j.jlumin.2006.10.002, PII S0022231306007113
- L. B. Ma, R. Song, R. Huang, Y. Du, J. P. Ye, Y. Lin, and Y. Q. Wang, J. Lumin. 126, 536 (2007). 10.1016/j.jlumin.2006.10.002 (Pubitemid 46755275)
- (2007) Journal of Luminescence , vol.126 , Issue.2 , pp. 536-540
- Ma, L.B.¹ Song, R.² Huang, R.³ Du, Y.⁴ Ye, J.P.⁵ Lin, Y.⁶ Wang, Y.Q.⁷

11
- 17044414557
- Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4
- DOI 10.1063/1.1872211, 091908
- B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, Appl. Phys. Lett. 86, 091908 (2005). 10.1063/1.1872211 (Pubitemid 40495204)
- (2005) Applied Physics Letters , vol.86 , Issue.9 , pp. 1-3
- Kim, B.-H.¹ Cho, C.-H.² Kim, T.-W.³ Park, N.-M.⁴ Sung, G.Y.⁵ Park, S.-J.⁶

12
- 33747397898
- Using silicon nanostructures for the improvement of silicon solar cells' efficiency
- DOI 10.1016/j.tsf.2005.12.008, PII S0040609005023369
- J. De la Torre, G. Bremond, M. Lemiti, G. Guillot, P. Mur, and N. Buffet, Thin Solid Films 511-512, 163 (2006). 10.1016/j.tsf.2005.12.008 (Pubitemid 44250837)
- (2006) Thin Solid Films , vol.511-512 , pp. 163-166
- De La Torre, J.¹ Bremond, G.² Lemiti, M.³ Guillot, G.⁴ Mur, P.⁵ Buffet, N.⁶

13
- 70349662129
- Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, September (unpublished),.
- B. Rezgui, T. Nychyporuk, A. Sibai, D. Bellet, M. Lemiti, and G. Bremond, Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, September 2008 (unpublished), p. 696.
- (2008) , pp. 696
- Rezgui, B.¹ Nychyporuk, T.² Sibai, A.³ Bellet, D.⁴ Lemiti, M.⁵ Bremond, G.⁶

14
- 10844286760
- Quantum confinement effect of silicon nanocrystals in situ grown in silicon nitride films
- DOI 10.1063/1.1814429, 3
- T.-Y. Kim, N.-M. Park, K.-H. Kim, G. Y. Sung, Y.-W. Ok, T.-Y. Seong, and C.-J. Choi, Appl. Phys. Lett. 85, 5355 (2004). 10.1063/1.1814429 (Pubitemid 40043576)
- (2004) Applied Physics Letters , vol.85 , Issue.22 , pp. 5355-5357
- Kim, T.-Y.¹ Park, N.-M.² Kim, K.-H.³ Sung, G.Y.⁴ Ok, Y.-W.⁵ Seong, T.-Y.⁶ Choi, C.-J.⁷

15
- 0029323656
- 10.1063/1.359062
- S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, J. Appl. Phys. 77, 6534 (1995). 10.1063/1.359062
- (1995) J. Appl. Phys. , vol.77 , pp. 6534
- Deshpande, S.V.¹ Gulari, E.² Brown, S.W.³ Rand, S.C.⁴

16
- 0346346274
- 10.1063/1.1331080
- K. Yamaguchi, K. Mizushima, and K. Sassa, Appl. Phys. Lett. 77, 3773 (2000). 10.1063/1.1331080
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3773
- Yamaguchi, K.¹ Mizushima, K.² Sassa, K.³

17
- 41349116546
- 10.1063/1.2902296
- H. L. Hao, L. K. Wu, and W. Z. Shen, Appl. Phys. Lett. 92, 121922 (2008). 10.1063/1.2902296
- (2008) Appl. Phys. Lett. , vol.92 , pp. 121922
- Hao, H.L.¹ Wu, L.K.² Shen, W.Z.³

18
- 36248934615
- Origin of visible luminescence in hydrogenated amorphous silicon nitride
- DOI 10.1063/1.2814053
- H. L. Hao, L. K. Wu, W. Z. Shen, and H. F. W. Dekkers, Appl. Phys. Lett. 91, 201922 (2007). 10.1063/1.2814053 (Pubitemid 350128896)
- (2007) Applied Physics Letters , vol.91 , Issue.20 , pp. 201922
- Hao, H.L.¹ Wu, L.K.² Shen, W.Z.³ Dekkers, H.F.W.⁴

19
- 33845939049
- 2 buffer and annealing
- DOI 10.1063/1.2408662
- M. Xu, S. Xu, J. W. Chai, J. D. Long, and Y. C. Ee, Appl. Phys. Lett. 89, 251904 (2006). 10.1063/1.2408662 (Pubitemid 46035124)
- (2006) Applied Physics Letters , vol.89 , Issue.25 , pp. 251904
- Xu, M.¹ Xu, S.² Chai, J.W.³ Long, J.D.⁴ Ee, Y.C.⁵

20
- 0344563333
- (World Scientific, Singapore),.
- W. S. Lau, Infrared Characterisation for Microelectronics (World Scientific, Singapore, 1999), p. 76.
- (1999) Infrared Characterisation for Microelectronics , pp. 76
- Lau, W.S.¹

21
- 0037626890
- 10.1103/PhysRevB.67.195304
- K. Nishio, J. Koga, T. Yamaguchi, and F. Yonezawa, Phys. Rev. B 67, 195304 (2003). 10.1103/PhysRevB.67.195304
- (2003) Phys. Rev. B , vol.67 , pp. 195304
- Nishio, K.¹ Koga, J.² Yamaguchi, T.³ Yonezawa, F.⁴

22
- 0003224744
- 10.1063/1.119621
- G. Allan, C. Delerue, and M. Lannoo, Appl. Phys. Lett. 71, 1189 (1997). 10.1063/1.119621
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1189
- Allan, G.¹ Delerue, C.² Lannoo, M.³

23
- 14344278734
- Quantum confinement in amorphous silicon quantum dots embedded in silicon nitride
- DOI 10.1103/PhysRevLett.86.1355
- N.-M. Park, C.-J. Choi, T.-Y. Seong, and S.-J. Park, Phys. Rev. Lett. 86, 1355 (2001). 10.1103/PhysRevLett.86.1355 (Pubitemid 32188312)
- (2001) Physical Review Letters , vol.86 , Issue.7 , pp. 1355-1357
- Park, N.-M.¹ Choi, C.-J.² Seong, T.-Y.³ Park, S.-J.⁴

24
- 17644428371
- 10.1016/S0169-4332(03)00369-6
- Z. Pei and H. L. Hwang, Appl. Surf. Sci. 212, 760 (2003). 10.1016/S0169-4332(03)00369-6
- (2003) Appl. Surf. Sci. , vol.212 , pp. 760
- Pei, Z.¹ Hwang, H.L.²

25
- 33746078433
- C. Ko, J. Joo, M. Han, B. Y. Park, J. H. Sok, and K. Park, J. Korean Phys. Soc. 48, 1277 (2006).
- (2006) J. Korean Phys. Soc. , vol.48 , pp. 1277
- Ko, C.¹ Joo, J.² Han, M.³ Park, B.Y.⁴ Sok, J.H.⁵ Park, K.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.