Formation of silicon nano-dots in luminescent silicon nitride

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 760-764

  Pei, Zingway ^a   Hwang, H L ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Photoluminescence; Si nano dots; Silicon nitride

Indexed keywords

ANNEALING; CHEMICAL BONDS; FILM GROWTH; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

NANO-DOTS;

SILICON NITRIDE;

EID: 17644428371     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00369-6     Document Type: Conference Paper

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