Localized heating on silicon field effect transistors: Device fabrication and temperature measurements in fluid

Lab on a Chip

Volumn 9, Issue 19, 2009, Pages 2789-2795

  Elibol, Oguz H ^a,d   Reddy Jr , Bobby ^c   Nair, Pradeep R ^a   Dorvel, Brian ^c   Butler, Felice ^a,b   Ahsan, Zahab S ^a   Bergstrom, Donald E ^a,b   Alam, Muhammad A ^a   Bashir, Rashid ^c  

^a PURDUE UNIVERSITY   (United States)

^b PURDUE UNIVERSITY   (United States)

^c University of Illinois at Urbana Champaign   (United States)

^d INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ARTICLE; DEVICE; DIELECTRIC CONSTANT; ELECTRIC POTENTIAL; FLUORESCENCE; HEATING; PRIORITY JOURNAL; SEMICONDUCTOR; TEMPERATURE MEASUREMENT; THERMOMETRY;

EID: 70349319243     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/b906048k     Document Type: Article

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