Nanoscale thickness double-gated field effect silicon sensors for sensitive pH detection in fluid

Applied Physics Letters

Volumn 92, Issue 19, 2008, Pages

  Elibol, Oguz H ^a   Reddy Jr , Bobby ^b   Bashir, Rashid ^b  

^a PURDUE UNIVERSITY   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EFFECT SEMICONDUCTOR DEVICES; GATE DIELECTRICS; PH SENSORS; SILICON ON INSULATOR TECHNOLOGY;

CONDUCTING SURFACES; DOUBLE GATE SILICON ON INSULATOR FIELD EFFECT DEVICES; PH SENSITIVITY;

SILICON SENSORS;

EID: 44049091047     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2920776     Document Type: Article

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