Synchrotron microscopy and spectroscopy for analysis of crystal defects in silicon

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 6, Issue 3, 2009, Pages 765-771

  Seifert, Winfried ^a,b   Vyvenko, Oleg F ^c   Arguirov, Tzanimir ^a,b   Erko, Alexei ^d   Kittler, Martin ^a,b   Rudolf, Carsten ^f   Salome, Murielle ^e   Trushin, Maxim ^b   Zizak, Ivo ^d  

^a IHP   (Germany)

^b BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^c ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^d HAHN MEITNER INSTITUT   (Germany)

^e EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^f UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE GRAINS; AS-GROWN; ELECTRICAL ACTIVITIES; METAL PRECIPITATES; MICRO SPECTROSCOPY; MONOCRYSTALLINE WAFERS; MULTICRYSTALLINE SI; RECOMBINATION ACTIVITY; SYNCHROTRON-BASED MICROPROBE; X RAY BEAM; X-RAY FLUORESCENCE MICROSCOPY;

DEFECTS; FLUORESCENCE MICROSCOPY; GRAIN BOUNDARIES; MICROELECTRONICS; PHOTOVOLTAIC EFFECTS; POLYSILICON; PRECIPITATION (CHEMICAL); SILICIDES; SYNCHROTRONS; TRANSITION METALS;

SILICON WAFERS;

EID: 70349227335     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200880717     Document Type: Conference Paper

References (15)

1. M. Kittler, C. Ulhaq-Bouillet, and V. Higgs, J. Appl. Phys. 78, 4573 (1995).
2. V. Kveder, M. Kittler, and W. Schröter, Phys. Rev. B 63, 115208 (2001).
3. A. A. Istratov, T. Buonassisi, R. J. McDonald, A. R. Smith, A. Schindler, J. R. Rand, J. P. Kalejs, and E. R. Weber, J. Appl. Phys. 94, 6552 (2003).
4. S. A. McHugo, A. C. Thomson, I. Perichaud, and S. Martinuzzi, Appl. Phys. Lett. 72, 3482 (1998).
5. O. F. Vyvenko, T. Buonassisi, A. A. Istratov, H. Hieslmair, A. C. Thompson, R. Schindler, and E. R. Weber, J. Appl. Phys. 91, 3614 (2002).
6. T. Buonassisi, A. A. Istratov, M. A. Marcus, M. Heuer, M. D. Picket, B. Lai, Z. Cai, S. M. Heald, and E. R. Weber, Solid State Phenomena 108/109, 577 (2005).
7. T. Buonassisi, A. A. Istratov, M. A. Marcus, B. Lai, Z. Cai, S. M. Heald, and E. R. Weber, Nature Mater. 4, 676 (2005).
8. W. Seifert, O. Vyvenko, I. Zizak, A. Erko, M. Trushin, and M. Kittler, in: Proc. 22nd European Photovoltaic Solar Energy Conference, Milan, Italy, 2007 (WIP-Renewable Energies, Munich, 2007), pp. 1719-1721.
9. M. Reiche, K. Scheerschmidt, D. Conrad, R. Scholz, A. Plößl, U. Gösele, and K. N. Tu, Inst. Phys. Conf. Ser. 157, 447 (1997).
10. M. Seibt, private communication.
11. M. Heuer, T. Buonassisi, A. A. Istratov, M. D. Pickett, M. A. Marcus, A. M. Minor, and E. R. Weber, J. Appl. Phys. 101, 123510 (2007).
12. W. Seifert et al., to be published in Superlattices Microstruct.
13. X. Zhang, D. Yang, R. Fan, J. Zhang, and D. Que, J. Appl. Phys. 84, 5502 (1998).
14. C. Donolato, Mater. Sci. Eng. B 24, 61 (1994).
15. T. Buonassisi, M. A. Marcus, A. A. Istratov, M. Heuer, T. Ciszek, B. Lai, Z. Cai, and E. R. Weber, J. Appl. Phys. 97, 063503 (2005).