Effect of iron on oxygen precipitation in nitrogen-doped Czochralski silicon

Journal of Applied Physics

Volumn 84, Issue 10, 1998, Pages 5502-5505

  Zhang, Xiwen ^a   Yang, Deren ^a   Fan, Ruixin ^a   Zhang, Jinxin ^a   Que, Duanlin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004431098     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368854     Document Type: Article

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