SEM and XPS studies of nanohole arrays on InP(1 0 0) surfaces created by coupling AAO templates and low energy Ar+ ion sputtering

Surface Science

Volumn 603, Issue 19, 2009, Pages 2923-2927

  Robert Goumet, C ^a,b   Monier, G ^a,b   Zefack, B ^a,b   Chelda, S ^a,b   Bideux, L ^a,b   Gruzza, B ^a,b   Awitor, O K ^a,b  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

^b CNRS   (France)

Author keywords

Anodized aluminum oxide (AAO); III V semiconductors; Indium droplets; Indium phosphide (InP); Ion beam; Nanohole patterned surfaces (NHPS); Scanning electron microscopy (SEM); X ray spectroscopy (XPS)

Indexed keywords

ANODIZED ALUMINUM OXIDE (AAO); III-V SEMICONDUCTORS; INDIUM DROPLETS; NANOHOLE-PATTERNED SURFACES (NHPS); X-RAY SPECTROSCOPY (XPS);

ALUMINA; ALUMINUM; DROP FORMATION; INDIUM; INDIUM PHOSPHIDE; ION BEAMS; ION BOMBARDMENT; IONS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; X RAY SPECTROMETERS; X RAY SPECTROSCOPY;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70349223886     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2009.07.006     Document Type: Article

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