Fabrication of indium nitride nanodots using anodic alumina templates

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 5 B, 2003, Pages

  Guo, Qixin ^a   Mei, Xiangyang ^b   Ruda, Harry ^b   Tanaka, Tooru ^a   Nishio, Mitsuhiro ^a   Ogawa, Hiroshi ^a  

^a SAGA UNIVERSITY   (Japan)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

Anodic alumina template; Indium nitride; Nanodots; Reactive sputtering; Semiconductor

Indexed keywords

ALUMINA; INDIUM COMPOUNDS; OPTOELECTRONIC DEVICES; SEMICONDUCTOR MATERIALS; SPUTTERING;

REACTIVE SPUTTERING;

NANOSTRUCTURED MATERIALS;

EID: 0037697355     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l508     Document Type: Article

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