Comparison of diamond bias enhanced nucleation on Ir and 3C-SiC: A high resolution electron energy loss spectroscopy study

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 9, 2009, Pages 1972-1977

  Hoffman, A ^a   Michaelson, Sh ^a   Akhvlediani, R ^a   Hangaly, N K ^a   Gsell, S ^b   Brescia, R ^b,d   Schreck, M ^b   Stritzker, B ^b   Arnault, J C ^c   Saada, S ^c  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b UNIVERSITY OF AUGSBURG   (Germany)

^c DIF   (France)

^d CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; BIAS-ENHANCED NUCLEATION; CARBON LAYERS; DIAMOND CRYSTALS; DIAMOND GROWTH; DIAMOND NUCLEATION; ELEMENTAL SEMICONDUCTORS; HIGH RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGENATED CARBON; NON-CARBIDE FORMING METALS; NUCLEATION LAYERS; NUCLEATION PROCESS; OPTICAL PHONONS; PROCESS STEPS; UNIQUE FEATURES; VARIOUS SUBSTRATES; VIBRATIONAL FEATURES;

AMORPHOUS CARBON; DIAMONDS; DISSOCIATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISSIPATION; GRAIN BOUNDARIES; ION BOMBARDMENT; IONS; IRIDIUM; NUCLEAR INSTRUMENTATION; NUCLEATION; SEMICONDUCTOR GROWTH; SILICON CARBIDE; THREE DIMENSIONAL;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 70349088187     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200982204     Document Type: Article

References (27)

1. K. Ohtsuka, K. Suzuki, A. Sawabe, and T. Inuzuka, Jpn. J. Appl. Phys. 35, L1072 (1996).
2. R. Brescia, M. Schreck, S. Gsell, M. Fischer, and B. Stritzker, Diamond Relat. Mater. 17, 1045 (2008).
3. B. Golding, C. Bednarski-Meinke, and Z. Dai, Diamond Relat. Mater. 13, 545 (2004).
4. M. Schreck, H. Roll, and B. Stritzker, Appl. Phys. Lett. 74, 650 (1999).
5. M. Schreck, F. Ḧormann, H. Roll, T. Bauer, and B. Stritzker, New Diamond Front. Carbon Technol. 11, 189 (2001).
6. X. Jiang, K. Schiffmann, and C.-P. Klages, Phys. Rev. B 50, 8402 (1994).
7. B. R. Stoner, G. H. Ma, S. D.Wolter,W. Zhu, Y.-C.Wang, R. F. Davis, and J. T. Glass, Diamond Relat. Mater. 2, 142 (1993).
8. F. Ḧormann, M. Schreck, and B. Stritzker, Diamond Relat. Mater. 10, 1617 (2001).
9. T. Aoyama, N. Amano, T. Goto, T. Abukawa, S. Kono, Y. Ando, and A. Sawabe, Diamond Relat. Mater. 16, 594 (2007).
10. S. Kono, M. Shiraishi, N. I. Plusnin, T. Goto, Y. Ikejima, T. Abukawa, M. Shimomura, Z. Dai, C. Bednarski-Meinke, and B. Golding, New Diamond Front. Carbon Technol. 15, 363 (2005).
11. T. Fujisaki, M. Tachiki, N. Taniyama, M. Kudo, and H. Kawarada, Diamond Relat. Mater. 12, 246 (2003).
12. J. C. Arnault, F. Vonau, M. Mermoux, F. Wyczisk, and P. Legagneux, Diamond Relat. Mater. 13, 401 (2004).
13. I. Gouzman, A. Hoffman, G. Comtet, L. Hellner, G. Dujardin, and M. Petravic, Appl. Phys. Lett. 72, 2517 (1998).
14. P. Bernhard, C. Ziethen, G. Scḧonhense, M. Schreck, T. Bauer, S. Gsell, and B. Stritzker, Jpn. J. Appl. Phys. 45, L984 (2006).
15. S. Gsell, M. Schreck, T. Bauer, H. Karl, G. Thorwarth, A. Bergmaier, G. Dollinger, and B. Stritzker, Diamond Relat. Mater. 14, 328 (2005).
16. J. C. Arnault, S. Saada, Sh. Michaelson, N. K. Hangaly, R. Akhvlediani, and A. Hoffman, Diamond Relat. Mater. 17, 377 (2008).
17. Sh. Michaelson, O. Ternyak, R. Akhvlediani, A. Hoffman, A. Lafosse, R. Azria, O. A. Williams, and D. M. Gruen, J. Appl. Phys. 102, 113516 (2007).
18. M. Schreck, F. Ḧormann, S. Gsell, Th. Bauer, and B. Stritzker, Diamond Relat. Mater. 15, 460 (2006).
19. S. Gsell, S. Berner, T. Brugger, M. Schreck, R. Brescia, M. Fischer, T. Greber, J. Osterwalder, and B. Stritzker, Diamond Relat. Mater. 17, 1029 (2008).
20. Sh. Michaelson, A. Hoffman, and Y. Lifshitz, Appl. Phys. Lett. 89, 223112 (2006).
21. Sh. Michaelson, O. Ternyak, A. Hoffman, O. A.Williams, and D. M. Gruen, Appl. Phys. Lett. 91, 103104 (2007).
22. J. C. Arnault, S. Delclos, S. Saada, N. Tranchant, and P. Bergonzo, J. Appl. Phys. 101, 014904 (2007).
23. Sh. Michaelson and A. Hoffman, Diamond Relat. Mater. 17, 920 (2008).
24. Y. Lifshitz, Th. Kohler, Th. Frauenheim, I. Guzmann, A. Hoffman, R. Q. Zhang, X. T. Zhou, and S. T. Lee, Science 297, 1531 (2002).
25. Y. Lifshitz, X. M. Meng, S. T. Lee, R. Akhvlediani, and A. Hoffman, Phys. Rev. Lett. 93, 056101 (2004).
26. A. Hoffman, A. Lafosse, Sh. Michaelson, M. Bertin, and R. Azria, Surf. Sci. 602, 3026 (2008).
27. Sh. Michaelson, R. Akhvlediani, and A. Hoffman, J. Appl. Phys. 104, 083527 (2008).