Initial growth of heteroepitaxial diamond on Ir (0 0 1)/MgO (0 0 1) substrates using antenna-edge-type microwave plasma assisted chemical vapor deposition

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 246-250

  Fujisaki, Toyokatsu ^a,b   Tachiki, Minoru ^a,b   Taniyama, Norikazu ^c   Kudo, Minoru ^c   Kawarada, Hiroshi ^a,b,d  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b WASEDA UNIVERSITY   (Japan)

^c Kaiyo Denshi Co Ltd   (Japan)

^d FCT Project/JFCC   (Japan)

Author keywords

Chemical vapor deposition; Diamond; Heteroepitaxy; Iridium

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SCANNING ELECTRON MICROSCOPY;

BIAS-ENHANCED NUCLEATION (BEN);

DIAMONDS;

DIAMOND;

EID: 0037766191     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00037-2     Document Type: Article

References (12)

1. Ohtsuka, K., Suzuki, K., Sawabe, A., & Inuzuka, T. (1996). Jpn. J. Appl. Phys.. 35 L1072.
2. Ohtsuka, K., Fukuda, H., Suzuki, K., & Sawabe, A. (1997). Jpn. J. Appl. Phys.. 36 L1214.
3. Schreck, M., Roll, H., & Stritzker, B. (1999). Appl. Phys. Lett.. 74 650.
4. Tsubota, T., Ohta, M., Kusakabe, K., Morooka, S., Watanabe, M., & Maeda, H. (2000). Diamond Relat. Mater.. 9 1380.
5. Saito, T., Tsuruga, S., & Ohya, N. (1998). Diamond Relat. Mater.. 7 1381.
6. Sawabe, A., Fukuda, H., Suzuki, T., Ikuhara, Y., & Suzuki, T. (2000). Surf. Sci.. 467 845.
7. Hörman, F., Schreck, M., & Stritzker, B. (2001). Diamond Relat. Mater.. 10 1617.
8. Ḧrman, F., Roll, H., Schreck, M., & Stritzker, B. (2000). Diamond Relat. Mater.. 9 256.
9. Taniyama, N., Kudo, M., Matsumoto, O., & Kawarada, H. (2001). Jpn. J. Appl. Phys.. 40 698.
10. Tachiki, M., Fujisaki, T., Taniyama, N., Kudo, M., & Kawarada, H. (2002). J. Crystal Growth. 237-239(Part 2), 1277.
11. Fujisaki, T., Tachiki, M., Taniyama, N., Kudo, M., & Kawarada, H. (2002). Diamond Relat. Mater.. 11 478.
12. Yugo, S., Kanai, T., Kimura, T., & Muto, T. (1991). Appl. Phys. Lett.. 58 1036.