Influence of germanium on thermal dewetting and agglomeration of the silicon template layer in thin silicon-on-insulator

Journal of Physics D: Applied Physics

Volumn 42, Issue 17, 2009, Pages

  Zhang, P P ^a,c   Yang, B ^a,d   Rugheimer, P P ^a,e   Roberts, M M ^a,f   Savage, D E ^a   Liu, Feng ^b   Lagally, M G ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b UNIVERSITY OF UTAH   (United States)

^c MICHIGAN STATE UNIVERSITY   (United States)

^d IBM   (United States)

^e MONTANA STATE UNIVERSITY   (United States)

^f UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DE-WETTING; LONG-RANGE ORDERING; SHAPE ANISOTROPY; SI(0 0 1); SILICON ON INSULATOR; SURFACE ENERGY ANISOTROPY; TEMPLATE LAYERS; THERMAL DEWETTING; ULTRATHIN SILICON;

AGGLOMERATION; ANISOTROPY; MICROSENSORS; NANOCRYSTALS; SURFACE CHEMISTRY; SURFACE TENSION; THREE DIMENSIONAL;

GERMANIUM;

EID: 70249096672     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/17/175309     Document Type: Article

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