Microstructure evaluation and mechanical properties of nanolayered chromium nitride/tungsten nitride coating

Journal of Electronic Materials

Volumn 34, Issue 12, 2005, Pages 1533-1537

  Wu, Fan Bean ^a   Tien, Shi Kang ^a   Duh, Jenq Gong ^a   Lee, Jyh Wei ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Tung Nan Institute of Science and Technology   (Taiwan)

Author keywords

Chromium nitride (CrN); Hardness; Nanoindentation; Nanolayered; Tungsten nitride (WN)

Indexed keywords

COATINGS; MAGNETRON SPUTTERING; MULTILAYERS; NANOSTRUCTURED MATERIALS; TUNGSTEN COMPOUNDS;

DUAL GUN SYSTEMS; MULTILAYER COATINGS; NANOIDENTATION;

CHROMIUM COMPOUNDS;

EID: 30144438669     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0161-y     Document Type: Conference Paper

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