Effect of deposition pressure on microstructure and tribological behavior of MoS x/MoS x-Mo nanoscale multi-layer films

Tribology Letters

Volumn 25, Issue 2, 2007, Pages 87-91

  Chen, L M ^a   Tu, J P ^a   Zhang, S C ^a   Peng, S M ^a   Gu, B ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Deposition pressure; Environment; Magnetron sputtering; MoS x film; Multilayer

Indexed keywords

BALL-ON-DISK TRIBOMETER; DEPOSITION PRESSURE; MULTI-LAYER FILMS;

DEPOSITION; FRICTION; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; TRIBOLOGY; WEAR RESISTANCE;

MULTILAYERS;

DEPOSITION; FRICTION; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; MULTILAYERS; TRIBOLOGY; WEAR RESISTANCE;

EID: 33846474311     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-006-9039-2     Document Type: Article

References (16)

1. Hilton M.R., Fleischauer P.D. (1992) Surf. Coat. Technol. 54/55:435
2. Rapoport L., Feldman Y., Homyonfer M. (1999) Wear 225-229:975
3. Zhang X., Prakash B., Lauwerens W., Zhu X.D., He J.W., Celis J.-P. (2003) Tribol. Lett. 14:131
4. Hilton M.R., Jayaram G., Marks L.D. (1998) J. Mater. Res. 13:1022
5. Lince J.R. (2004) Tribol. Lett. 17:419
6. Simmonds M.C., Savan A., Van Swygenhoven H., Pfluger E., Mikhailov S. (1998) Surf. Coat. Technol. 108/109:340
7. Wise G., Teresiak A., Bacher I., Markschlager P., Kampschulte G. (1995) Surf. Coat. Technol. 76/77:382
8. Hilton M.R., Bauer R., Didziulis S.V., Dugger M.T., Keem J.M., Scholhamer J. (1992) Surf. Coat. Technol. 53:13
9. Sun J.Y., Weng L.J., Yu D.Y. (2002) Vacuum 65:51
10. Thornton J.A. (1986) J. Vac. Sci. Technol. A4:3059
11. E. Arslan, F. Bülbül, A. Alsaran, A. Celik and I. Efeoglu Wear 259 (2005) 814
12. Zhang X., Vitchev R.G., Lauwerens W., Stals L., He J., Celis J.-P. (2001) Thin Solid Films 396:69
13. Savan A., Haefke H., Simmonds M.C., Constable C.P. (2002) J. Vac. Sci. Tecchnol. A 20:1682
14. FleischauerP.D., Lince J.R. (1999) Tribol. Inter. 32:627
15. Lauwerens W., Wang J.H., Navratil J., Wieërs E., D'haen J., Stals L.M., Celis J.P. (2000) Surf. Coat. Technol. 131:216
16. Levy F., Moser J. (1994) Surf. Coat. Technol. 68/69:433