Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 2, 2008, Pages

  Zimmer, Fabian ^a   Heberer, Andreas ^a   Grüger, Heinrich ^a   Schenk, Harald ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Micromechanical reflection grating; Microscanning mirror; Scanning grating; Spectrometer; Spectroscopy

Indexed keywords

DIGITAL SIGNAL PROCESSORS; INFRARED DEVICES; INVESTMENTS; SCANNING; SIGNAL PROCESSING; SPECTROMETRY; SPECTRUM ANALYZERS;

CONTROL STRUCTURE; DEFLECTION ANGLES; FABRICATION PROCESS; GRATING STRUCTURES; INGAAS DIODE; KEY PARAMETERS; MECHANICAL SHOCK; MICRO-SCANNING; MICROSPECTROMETERS; NANO METER RANGE; NEAR INFRARED; NIR SPECTROMETER; PULSED VOLTAGES; REFLECTION GRATINGS; SCANNING GRATING; SPECTRAL EFFICIENCIES; SPECTRAL MEASUREMENT; SPECTRAL RANGE; STATIC DEFORMATIONS;

SPECTROMETERS;

EID: 70049105992     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2911035     Document Type: Conference Paper

References (19)

1. H. W. Siesler, Near-Infrared Spectroscopy, Wiley-VCH, Weinheim, Germany (2002).
2. P. Krippner and J. Mohr, "Microspectrometer system for the nearinfrared wavelength range based on LIGA technology," Proc. SPIE 3912, 141-149 (2000). (Pubitemid 30586338)
3. R. F. Wolffenbuttel, "State-of-the-art in integrated optical microspectrometers," IEEE Trans. Instrum. Meas. 53, 197-202 (2004).
4. E. R. Deutsch, "Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)," Ph.D. thesis, MIT (2002).
5. O. Solgaard, "Micromechanical gratings for visible and near-infrared spectroscopy," IEEE J. Sel. Top. Quantum Electron. 10(3), 604-613 (2004).
6. M.-H. Kiang and R. S. Muller, "Surface-micromachined diffraction gratings for scanning spectroscopic applications," International Conference on Solid-State Sensors and Actuators, Transducers'97, IEEE, Chicago, 343-345 (1997).
7. H. Schenk, "Ein neuartiger mikromechanischer aktor zur ein- und zweidimensionalen ablenkung von licht," Ph.D. thesis, Gerhard- Mercator-University Duisburg, Germany (2001).
8. T. Klose, D. Kunze, T. Sandner, H. Schenk, and H. Lakner, "Stress optimization of a micromechanical torsional spring," Nanotechnology 3, 602-605 (2005). (Pubitemid 43196882)
9. M. C. Hutley, Diffraction Gratings, Academic Press, New York (1982).
10. C. Palmer, Diffraction Grating Handbook, 5th ed., Thermo RGL, New York (2002).
11. Diffraction Gratings Ruled and Holographic Handbook, HORIBA Jobin Yvon Inc., Edison, NJ.
12. E. G. Loewen and E. Popov, Diffraction Gratings and Applications, Marcel Dekker Inc., New York (1997).
13. B. Kress and P. Meyrueis, Digital Diffractive Optics, John Wiley and Sons, Inc., New York (2000).
14. D. M. Burns and V. M. Bright, "Micro-electro-mechanical variable blaze gratings," IEEE 10th Annual International Workshop on Micro Mechanical Systems, 1997, pp. 385-391.
15. F. Gao, "One-step lithography for fabrication of multifunction diffractive structures with grey-tone mask," Microelectron. Eng. 61-62, 165-171 (2002). (Pubitemid 34613361)
16. E. Navarette-Garcia and S. Calixto, "Continuous surface relief microoptical elements fabricated on photographic emulsions by use of binary and halftone masks," Opt. Mater. 23, 501-512 (2003).
17. F. Zimmer and H. Grüger, "Development of high-efficient NIRscanning gratings for spectroscopic applications," Proc. SPIE 6114, 611407 (2006).
18. H. Schenk, P. Duerr, and U. Sobe, "A novel electrostatically driven torsional actuator," 3rd Intl. Conf. Micro Opto Electro Mechan. Syst. (MOEMS), pp. 3-10 (1999).
19. H. Schenk and H. Lakner, Large deflection micromechanical scanning mirrors for linear scans and pattern generation," IEEE J. Sel. Top. Quantum Electron. 5, 715-722 (2000). (Pubitemid 32134537)