Development of high-efficient NIR-scanning gratings for spectroscopic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Zimmer, F ^a   Grueger, H ^a   Heberer, A ^a   Sandner, Th ^a   Schenk, H ^a   Lakner, H ^a   Kenda, A ^b   Scherf, W ^b  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b CTR CARINTHIAN TECH RESEARCH AG   (Austria)

Author keywords

Micro mechanical reflection grating; Micro scanning mirror; Miniaturized NIR spectrometer; NIR spectroscopy; Scanning grating

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; MIRRORS; OPTOELECTRONIC DEVICES; SPECTROMETERS; SPECTROSCOPIC ANALYSIS;

MICRO MECHANICAL REFLECTION GRATING; MICRO SCANNING MIRROR; MINIATURIZED NIR SPECTROMETER; NIR SPECTROSCOPY; SCANNING GRATING;

MICROELECTROMECHANICAL DEVICES;

EID: 33646197555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.644481     Document Type: Conference Paper

References (8)

1. H. Grueger et al., "Realization of a spectrometer with micromachined scanning grating", Proc. Photonics Fabrication, Vol. 4945, Brugge, Belgium, 2002
2. H. Grueger et al., "Performance and Applications of a spectrometer with micromachined scanning grating", Proc. Photonics West, Vol. 4987, San Jose, USA, 2003
3. F. Zimmer et. al.: "Development of a NIR micro spectrometer based on a MOEMS scanning grating", Photonics Europe 2004, Strasbourg, France, SPIE vol. 5455, Apr. 2004
4. H. Schenk et. al.: "A new driving principle for micromechanical torsional actuators", Micro Electro Mechanical Systems 1999, New York, NY : The American Society of Mechanical Engineers ASME, 1999, S.333-338
5. H. Schenk et. al.: "Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors", SPIE Proc. 4178, 18-19, Sept.2000, pp. 320-324
6. A. Wolter et al., "Improved layout for a resonant 2D micro scanning mirror with low operation voltages", Proc. MOEMS Display and Imaging Systems, Vol. 4985, San Jose, USA. 2003
7. A. Thorne, U. Litzen, S. Johansson, "Spectrophysics", Springer-Verlag, Heidelberg, 1999
8. M. C. Hutley, "Diffraction gratings", Academic Press Limited, 1982