Stress optimization of a micromechanical torsional spring

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 602-605

  Klose, T ^a   Kunze, D ^a   Sandner, T ^a   Schenk, H ^a   Lakner, H ^a   Schneider, A ^b   Schneider, P ^b  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS   (Germany)

Author keywords

ANSYS ; MEMS; MOSCITO; Optimization; Torsional spring

Indexed keywords

COMPUTER AIDED DESIGN; FINITE ELEMENT METHOD; OPTIMIZATION; SPRINGS (COMPONENTS); TORSIONAL STRESS;

ANSYS®; MEMS; MOSCITO; TORSIONAL SPRING;

COMPOSITE MICROMECHANICS;

EID: 32044467159     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. P. Schneider, A. Schneider, J. Bastian, S. Reitz, and P. Schwarz, "Moscito - a program system for mems optimization," tech. rep., Fraunhofer Institute for Integrated Circuits, 2002.
2. P. Schneider, S. Parodat, A. Schneider, and P. Schwarz, "A modular approach for simulation-based optimization of mems," Design, Modeling, and Simulation in Microelectronics, November 2000.
3. K. Petersen, "Silicon as a mechanical material," Microsensors, IEEE Press, 1990.
4. A. Wolter, H. Schenk, H. Korth, and H. Lakner, "Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror," SPIE Proceedings Series 5343, January 2004.
5. J. Mehner, Entwurf in der Mikrosystemtechnik. Dresden Univ. Press, 1999.
6. H. Göldner, Höhere Festigkeitslehre. Fachbuchverlag Leipzig, 1979.
7. W. Beitz and K. Küttner, Dubbel - Taschenbuch für dem Maschinenbau. Springer-Verlag Berlin, 18 ed., 1995.