High precision line scale calibrations with the PTB nanometer comparator

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 2, Issue , 2007, Pages 5-8

  Flugge J ^a   Koning R ^a   Bosse, H ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPARATORS (OPTICAL); INTERFEROMETERS; LASER INTERFEROMETRY; UNCERTAINTY ANALYSIS;

ABBE ERRORS; HIGH QUALITY; LASER INTERFEROMETER; LENGTH MEASUREMENT; LINE STRUCTURES; LINEAR ENCODERS; MEASUREMENT UNCERTAINTY; OPTIMISATIONS;

PRECISION ENGINEERING;

EID: 84908237900     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. R. Kö ning, J. Flügge, H.Bosse: Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders. Recent developments in traceab le dimensional measurements III : 31 July-1 August 2005 ; Proceedings of SPIE ; 5879; ISBN 08194-5884-8, (2005), 5879-08
2. H. Bosse, W. Häß ler-Grohne, J. Flügge, R. Köning: Final report on CCL-S3 su pplementary line scale comparison Nano3, Metrologia 40 (Technical Supplement 2003) 04002
3. J. Flügge, R. Köning: Status of the nanometer comparator at PTB Proc. SPIE, Recent Developments in Traceable Dimensio nal Measurements, Jennifer E. Decker; Nicholas Brown; Eds. 2001, Vol. 4401, p. 275-283
4. J. Flügge, R. Köning, H. Bosse: Control system for guiding deviations on the PTB nanometer comparator. Proc. 5th euspen International Conf.: May 8th-May 11th 2005, Montpellier, France (2005), 233-236
5. R. Kö ning, J. Flügge, H.Bosse: Achievement of sub nanometer reproducibility in line scale measurements with the Nanometer Comparator. SPIE Advanced Lithography, 25 February-2 March 2007, San Jose, California USA