High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART I, Issue , 2005, Pages 385-392

  Gerhardt, Joachim ^a   Geckeler, Ralf ^a   Schulz, Michael ^a   Elster, Clemens ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Angular measurement; Distance sensor; High accuracy; High resolution; Least squares; Topography

Indexed keywords

ANGLE MEASUREMENT; ERROR ANALYSIS; LEAST SQUARES APPROXIMATIONS; OPTICAL RESOLVING POWER; SCANNING;

DISTANCE SENSOR; HIGH ACCURACY; HIGH RESOLUTION; LEAST-SQUARES; TOPOGRAPHY;

OPTICAL SENSORS;

EID: 28844466963     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612492     Document Type: Conference Paper

References (6)

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5. Elster C, Weingärtner I, Schulz M. Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors. Submitted to Prec. Eng.
6. Schulz, M, Thomsen-Schmidt P, Weingärtner I. A reliable curvature sensor for measuring the topography of complex surfaces. Proc. SPIE 2000, 4098: 84-93