Using high-resolution encoders in nanometer applications

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

Volumn 1, Issue , 2006, Pages 180-183

  Holzapfel, W ^a  

^a Dr Johannes Heidenhain GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABBE ERRORS; ENCODER TECHNOLOGY; HIGH RESOLUTION; PRECISION DEMAND;

PRECISION ENGINEERING;

EID: 84908302965     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. H. Kunzmann et al, Annals CIRP 42 (2) 1993, p 753-767
2. G. X. Zhang, Annals CIRP 38 (1) 1989, p 525-528