Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5879, Issue , 2005, Pages 1-9

  Köning, Rainer ^a   Flügge, Jens ^a   Bosse, Harald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Incremental encoder; Length comparator; Line scale interferometer; Non linearity; Vacuum interferometry

Indexed keywords

NANOTECHNOLOGY; OPTIMIZATION; PHOTOELECTRICITY;

INCREMENTAL ENCODER; LENGTH COMPARATOR; LINE SCALE INTERFEROMETER; NON-LINEARITY; VACUUM INTERFEROMETRY;

INTERFEROMETERS;

EID: 29244442332     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616332     Document Type: Conference Paper

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