Absolute profile measurement of large moderately flat optical surfaces with high dynamic range

Optics Express

Volumn 16, Issue 16, 2008, Pages 11975-11986

  Wiegmann, A ^a   Schulz, M ^a   Elster, C ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SYSTEMATIC ERRORS;

HIGH DYNAMIC RANGE; HIGHLY ACCURATE; NANO METER RANGE; OPTICAL SURFACES; PROFILE MEASUREMENT; REALISTIC SIMULATION; SCANNING STAGES;

INTERFEROMETERS;

ALGORITHM; ARTICLE; EQUIPMENT; INSTRUMENTATION; INTERFEROMETRY; METHODOLOGY; OPTICS; REFRACTOMETRY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTY;

ALGORITHMS; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; OPTICS; REFRACTOMETRY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTIES;

EID: 49149091474     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.011975     Document Type: Article

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