Further development of the nanometer comparator for straightness measurements at the nanometer level

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

Volumn 1, Issue , 2008, Pages 486-489

  Flugge J ^a   Koning R ^a   Wiegmann, A ^a   Weichert, Ch ^a   Schulz, M ^a   Elster, C ^a   Hassler Grohne W ^a   Bosse, H ^a   Geckeler, R D ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARATORS (OPTICAL); FILLERS; INTERFEROMETERS; LASER INTERFEROMETRY; LITHOGRAPHY; POSITION MEASUREMENT; PRECISION ENGINEERING;

CALIBRATION CAPABILITIES; HIGH-PRECISION POSITION; INCREMENTAL ENCODER; LASER INTERFEROMETER; LENGTH MEASUREMENT; MEASUREMENT UNCERTAINTY; STRAIGHTNESS MEASUREMENT; STRAIGHTNESS METROLOGIES;

UNCERTAINTY ANALYSIS;

EID: 84908312789     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. R. Köning, J. Flügge, H. Bosse: Characterizing the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders. Recent developments in traceable dimensional measurements III: 31 July - 1 August 2005 ; Proceedings of SPIE, Vol. 5879, 2005
2. I. Tiemann et. al.: An international length comparison using vacuum comparators and a photoelectric incremental encoder as transfer standard Prec Eng, 32, (2008) 1-6
3. C. Elster, I. Weingärtner, M. Schulz: Coupled distance sensor systems for highaccuracy topography measurement: Accounting for scanning stage and systematic sensor errors, Prec. Eng. 30, (2006) 32-38