Interferometric measurement of rotationally symmetric aspheric surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7389, Issue , 2009, Pages

  Küchel, Michael F ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Absolute measurement; Aspheric surfaces; Computer generated hologram; Distortion; Error analysis; Fizeau interferometer; Interferometric measurement; Retrace errors; Scanning; Stitching

Indexed keywords

ABSOLUTE MEASUREMENT; ASPHERIC SURFACES; COMPUTER GENERATED HOLOGRAM; DISTORTION; FIZEAU INTERFEROMETER; INTERFEROMETRIC MEASUREMENT; RETRACE ERRORS; STITCHING;

ASPHERICS; COMPUTER GENERATED HOLOGRAPHY; ERROR ANALYSIS; HOLOGRAMS; INTERFEROMETERS; INTERFEROMETRY; LASER OPTICS; OPTICAL DATA PROCESSING; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT;

MEASUREMENT ERRORS;

EID: 69949117352     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.830655     Document Type: Conference Paper

References (61)

1. http://imaging.nikon.com/products/imaging/technology/scene/25/index.htm
2. http://www.canon.com/technology/canon-tech/explanation/aspherical.html
3. Dörband, B.: "Analyse optischer Systeme," Chapter 5.1.5., Dissertationsschrift, Institute tics, Stuttgart, (1986).
4. Liu, Ying-Moh, Lawrence, G.N., and Koliopoulos, Ch.: "Subaperture testing of aspheres with annular zones," Appl. Opt. 27, 4504-4513 (1988).
5. nd Ed., "Null Tests Using Compensators," Wiley Interscience, (1992).
6. Melozzi, M., Pezzati, L., Mazzoni, A.: "Testing aspheric surfaces using multiple annular interferograms," Opt. Eng., 32, p 1073, (1993).
7. Adachi, I.P.: "General aspherical surface optical testing device," US Patent 5, 245, 402 (1993).
8. Huang, J.-J., Lin, T.: "Interferometric method for optical testing an object with an aspheric surface," US Patent, 5, 625, 454 (1997).
9. Beyerlein, M., Lindlein, N., and Schwider, J.: "Dual-wave-front computer-generated holograms for quasiabsolute testing of aspherics," Appl. Opt., 41, 2440-2447, (2002).
10. Zanoni, C.A.: "Apparatus and method for measuring aspherical optical surfaces and wavefronts," US Patent 6771375 (2004).
11. Küchel, M.: "Reconfigurable interferometer system," US Patent 6943896, (2004).
12. Evans, Ch., Küchel, M.: "Rapid in-situ mastering of an aspheric Fizeau," US Patent 6714308, (2004).
13. Küchel, M., "Dispersive null-optics for aspheric surface and wavefront metrology," US Patent 6717679 (2004).
14. Simon, F., G. Khan, K. Mantel, N. Lindlein, and J. Schwider: "Quasi-absolute measurement of aspheres with a combined diffractive optical element as reference," Appl. Opt., 45, 8606-8612, (2006).
15. Wang, X., Wang, L., Yin, L., Zhang, B., Fan, D., Zhang, X.: "Measurement of large aspheric surfaces by annular subaperture stitching interferometry," Chinese Optics Letters, Vol. 3, 645-647 (2007).
16. Hou, X., Wu, F., Yang, L., Chen, Q.: "Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method," Optics Express, Vol. 15, 12890-12899 (2007).
17. Chen, S., Li, S., Dai, Y., Ding, L., and Zeng S.: "Experimental study on subaperture testing with iterative stitching algorithm," Optics Express, Vol. 16, pp. 4760-4765 (2008).
18. Garbusi, E., Pruss, Ch. and Osten, W.: " Interferometer for precise and flexible asphere testing," Optics Letters, Vol. 33, 2973-2975 (2008).
19. Fercher, A.F.: "Computer-generated holograms for testing optical elements: error analysis and error compensation," Opt. Acta 23, 347-365, (1976).
20. Becker, K. and E. Heynacher: "M400 - a Coordinate Measuring Machine with 10nm Resolution," Proc. SPIE 802, pp. 209-216, (1987).
21. Kitabayashi, J.M., Kanoh, T.: "Device for optically measuring aspheric surface," US Patent 4, 743, 117 (1988).
22. Beckstette, K.: "Fabrication of X-Ray Optics," Proc. SPIE 1140, R. Benattar, ed., pp. 316-329 (1989).
23. Küchel, M., Wiedmann, W.: "In-process metrology for large astronomical mirrors," In: Advanced optical manufacturing and testing; Proc. SPIE A92-17451 05-74, pp. 280-294 (1990).
24. Glenn, P.: "Lambda-over-one-thousand Metrology Results for Steep Aspheres using a Curvature Profiling Technique," Proc. SPIE 1531, p. 54, (1991).
25. Burge, J.H. and Anderson, D.S.: "Full-Aperture interferometric test of convex secondary mirrors using holographic test plates," Proc. SPIE 2199, pp 181-192, (1994).
26. Burge, J. H., Anderson, D.S.: "System and method for interferometric measurement of aspheric surfaces utilizing test plate provided with computer-generated hologram", US Patent, 5, 737, 079 (1998
27. Schillke, F.: "Critical aspects on testing aspheres in interferometric setups," Proceedings Optical Fabrication and Testing, Europto Series Vol. 3739, pp317-324, (1999).
28. Sommargren, G.E., Phillion, D.W., Johnson, M.A., Nguyen, N.Q., Barty, A., Snell, F.J., Dillon, D.R. and Bradshelher, L.S.: "100-picometer interferometry for EUVL," in Emerging Lithographic Technologies VI, Pts 1 and 2, Proc. SPIE 4688, pp. 316-328, (2002).
29. Tronolone, M.J., Fleig, J.F., Huang, C.H., Bruning, J.H.: "Method of Testing Aspherical Optical surfaces with an Interferometer," U.S. Patent 5, 416, 586.
30. Griesmann, U., Soons, J., Wang, Q. and DeBra, D.: "Measuring Form and Radius of Spheres with Interferometry," CIRP Annals - Manufacturing Technology, Vol.53, pp. 451-454, (2004).
31. Assoufid, L. Bray, M., Quin, J., Shu, D.: "3-D surface profile measurements of large x-ray synchrotron radiation mirrors using stitching interferometry;" Technical Report, DE2002-801583; http://www.ipd.anl.gov/ anlpubs/2002/09/44233.pdf
32. Greivenkamp John E.: "Sub-Nyquist interferometry," Appl. Opt. 26, 5245-5258 (1987).
33. Arnold, S.M., Kestner, R.: "Verification and Certification of CGH Aspheric Nulls," Proc. SPIE 2536, pp. 117- 126 (1995).
34. Fleig, J., Dumas, P., Murphy, P.E. and Forbes, G.W.: "An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces," Proc. SPIE 5188, 296-307 (2003).
35. Tsutsumi, H., Yoshizumi, K., Takeuchi, H.: "Ultrahighly accurate 3D profilometer," Proc. SPIE, Vol.5638, 387-394 (2005).
36. Blümel, Th., Bosse, M.: "Interferometric Asphere Testing in a Spherical Test Setup," Detectors and Associated Signal Processing II. Edited by Chatard, Jean-Pierre; Dennis, Peter N. J. Proceedings of the SPIE, Volume 5965, pp. 351-358 (2005).
37. Küchel, M. US Patent No. 6781700, 6972849, 6879402.
38. Küchel, M. "Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces," in Optical Fabrication and Testing 2006 (OSA), OTFuB5.
39. Küchel, M.F.: "Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces," Optifab (2007) http://www.zygo.com/library/ papers/proc-TD04-25.pdf
40. Smythe, R.: "Asphere interferometry powers precision lens manufacturing," LaserFocusWorld, October (2006).
41. http://www.zygo.com/met/interferometers/verifire/at/verifire-at-specs.pdf http://www.zygo.com/met/interferometers/verifire/asphere/verifire-asphere-spec. pdf
42. Murphy, P., Fleig, J., Forbes, G., et al.: "Subaperture stitching interferometry for testing mild aspheres," Proc. SPIE 6293, 62930J-1-62930J-10 (2006).
43. http://www.engsynthesis.com/pdfs/intellium-asphere-overview.pdf Engineering Synthesis Design, Inc.; Copyright (2009). Rev 1.2
44. Dörband, B. and H. J. Tiziani: "Testing aspheric surfaces with adjustment and shape errors," Appl. Optics 24 (16), 2604-3261 (1985).
45. Evans, C.J.: "Compensation for Errors Introduced by Nonzero Fringe Densities in Phase-Measuring Interferometers," Annals of the CIRP Vol. 42/1, 577-580 (1993).
46. http://de.wikipedia.org/wiki/Evolute
47. Murphy, P.E., Brown, Th.G., and Moore, D.T.: "Interference imaging for aspheric surface testing," Appl. Opt. 39, 2122-2129, (2000).
48. Forbes, G.W.: "Shape specification for axially symmetric optical surfaces," Optics Express, Vol. 15, Iss. 8 - April 16, 2007, pp. 521-5226.
49. Evans, C.J., and Kestner, R. N.: "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996).
50. Freischlad, K. R.: "Absolute interferometric testing based on reconstruction of rotational shear," Appl. Opt. 40, 1637-1648 (2001).
51. Küchel, M.F.: "A new approach to solve the three flat problem," Optik (Jena) 112, 381-391 (2001).
52. Sasián, J. M., Lerner, S.A., Burge, J.H. and Martin H.M.: "Design, tolerancing, and certification of a null corrector to test 8.4 meter mirrors," SPIE Vol. 3739 (1999).
53. Schwenke, H.: "Abschätzung von Messunsicherheiten durch Simulation an Beispielen aus der Fertigungsmesstechnik," TU Chemitz, Diss., (1999).
54. Küchel, M.: "Spatial Coherence in Interferometry," http://www.zygo.com/library/papers/optatec2004.pdf
55. Malacara D., Malacara Z.: "Handbook of Lens Design," Chapter 2, Marcel Dekker, (1994).
56. Evans, Ch. J., Küchel, Ch. G., Parks, R. E. and Kuhn, W., P.: "Adaptive nulls for testing off-axis segments of aspherics," United States Patent Application 20060268282, filed May 2006, published October 2006.
57. Dresel, Th.: "In situ determination of pixel mapping in interferometry," Intern. Application No. PCT/US2006/048419, (2006).
58. Lowman, A. E. and Greivenkamp, J. E.: "Modeling an interferometer for non-null testing of aspheres," in Optical Manufacturing and Testing, V. J. Doherty and H. Stahl, eds., Proc. SPIE 2536, 139-147 (1995).
59. Pfund, J., Lindlein, N. and Schwider, J.: "Nonnull testing of rotationally symmetric aspheres: a systematic error assessment," Appl. Opt., 40, 439-446 (2001).
60. Schwider, J.: "Interferometric tests for aspherics," OSA TOPS, Vol.24 Fabrication and Testing of Aspheres, (1999).
61. Küchel, M.F., Sykora, D.M.: "Correlation Study between a New Interferometric Asphere Metrology System and Fizeau Interferometer," Key Engineering Materials, TRANS TECH PUBLICATIONS, (2008).