Ultrahigh accurate 3-D profilometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5638, Issue PART 1, 2005, Pages 387-394

  Tsutsumi, Hideki ^a   Yoshizumi, Keiichi ^a   Takeuchi, Hiroyuki ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

3 D measurement; Aspheric lens; Atomic force probe; Blu ray disc; Free form; Lens for optical disc; Ultrahigh accurate 3 D profilometer; User specific design formulae

Indexed keywords

ASPHERICS; CAMERAS; DIGITAL DEVICES; HARD DISK STORAGE; OPTICAL COMMUNICATION; SILICON WAFERS; VIDEODISKS;

3-D MEASUREMENT; ASPHERIC LENS; ATOMIC FORCE PROBE; BLU-RAY DISC; FREE FORM; LENS FOR OPTICAL DISC; ULTRAHIGH ACCURATE 3-D PROFILOMETER; USER-SPECIFIC DESIGN FORMULAE;

PROFILOMETRY;

EID: 19844382546     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.573774     Document Type: Conference Paper

References (4)

1. K..Yoshizumi.:Ultrahigh accuracy 3-D profilometer. Appl.Opt.26,p. 1647(1987)
2. H.Takeuchi, K.Handa, K.Kubo, K.Yosizumi.:The improvement in a performance of Ultrahigh Accurate 3-D Profilometer (UA3P) JSPE p335(1999)
3. Y.E.Tohme and J.A.Lowe: Machining of Freeform Optical Surfaces by Slow Slide Servo Method. Proceedings of ASPE 2003 Annual Meeting, Portland Oregon(Oct 26-31)
4. http://www.colorado.edu/isl/intimages/fluorescence2.html