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Volumn 40, Issue 10, 2001, Pages 1637-1648

Absolute interferometric testing based on reconstruction of rotational shear

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DATA PROCESSING; IMAGE RECONSTRUCTION; OPTICAL FILTERS; SHEAR STRESS;

EID: 0012754926     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.001637     Document Type: Article
Times cited : (94)

References (30)
  • 1
    • 0020844269 scopus 로고
    • Digital wave-front measuring interferometry: Some systematic error sources
    • J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, “Digital wave-front measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421-3432 (1983).
    • (1983) Appl. Opt. , vol.22 , pp. 3421-3432
    • Schwider, J.1    Burow, R.2    Elssner, K.-E.3    Grzanna, J.4    Spolaczyk, R.5    Merkel, K.6
  • 2
    • 0027883379 scopus 로고
    • Propagation errors in precision Fizeau interferometry
    • C. Huang, “Propagation errors in precision Fizeau interferometry,” Appl. Opt. 32, 7016-7021 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 7016-7021
    • Huang, C.1
  • 3
    • 0027151167 scopus 로고
    • Compensation of errors introduced by nonzero fringe densities in phase-measuring interferometers
    • C. J. Evans, “Compensation of errors introduced by nonzero fringe densities in phase-measuring interferometers,” Ann. CIRP 42, 577-580 (1993).
    • (1993) Ann. CIRP , vol.42 , pp. 577-580
    • Evans, C.J.1
  • 4
    • 84975538502 scopus 로고
    • Precise measurement of planeness
    • G. Schulz and J. Schwider, “Precise measurement of planeness,” Appl. Opt. 6, 1077-1084 (1967).
    • (1967) Appl. Opt. , vol.6 , pp. 1077-1084
    • Schulz, G.1    Schwider, J.2
  • 5
    • 0006559035 scopus 로고
    • Ein Interferenzverfahren zur absoluten Eben-heitsprufung langs beliebiger Zentralschnitte
    • G. Schulz, “Ein Interferenzverfahren zur absoluten Eben-heitsprufung langs beliebiger Zentralschnitte,” Opt. Acta 14, 375-388 (1967).
    • (1967) Opt. Acta , vol.14 , pp. 375-388
    • Schulz, G.1
  • 6
    • 0016892621 scopus 로고
    • Interferometric testing of smooth surfaces
    • E. Wolf, ed. (North-Holland, Amsterdam, Vol. XIII
    • G. Schulz and J. Schwider, “Interferometric testing of smooth surfaces,” in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1976), Vol. XIII.
    • (1976) Progress in Optics
    • Schulz, G.1    Schwider, J.2
  • 7
    • 0021468527 scopus 로고
    • Absolute calibration of an optical flat
    • B. S. Fritz, “Absolute calibration of an optical flat,” Opt. Eng. 23, 379-383 (1984).
    • (1984) Opt. Eng. , vol.23 , pp. 379-383
    • Fritz, B.S.1
  • 8
    • 0025444821 scopus 로고
    • Absolute testing of flatness standards at square-grid points
    • J. Grzanna and G. Schulz, “Absolute testing of flatness standards at square-grid points,” Opt. Commun. 77, 107-112 (1990).
    • (1990) Opt. Commun. , vol.77 , pp. 107-112
    • Grzanna, J.1    Schulz, G.2
  • 9
    • 85010120286 scopus 로고
    • Method and apparatus for absolute interferometric testing of plane surfaces
    • 5,106,19421 April
    • M. Kuchel, “Method and apparatus for absolute interferometric testing of plane surfaces,” U.S. patent 5,106,194 (21 April 1992).
    • (1992) U.S. Patent
    • Kuchel, M.1
  • 10
    • 0000653677 scopus 로고
    • Absolute flatness testing by the rotation method with optimal measuring-error compensation
    • G. Schulz and J. Grzanna, “Absolute flatness testing by the rotation method with optimal measuring-error compensation,” Appl. Opt. 31, 3767-3780 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 3767-3780
    • Schulz, G.1    Grzanna, J.2
  • 11
    • 0006572788 scopus 로고
    • Absolute flatness testing by an extended rotation method using two angles of rotation
    • G. Schulz, “Absolute flatness testing by an extended rotation method using two angles of rotation,” Appl. Opt. 32, 1055-1059 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 1055-1059
    • Schulz, G.1
  • 12
    • 0027653723 scopus 로고
    • Absolute testing of flats by using even and odd functions
    • C. Ai and J. C. Wyant, “Absolute testing of flats by using even and odd functions,” Appl. Opt. 32, 4698-4705 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 4698-4705
    • Ai, C.1    Wyant, J.C.2
  • 13
    • 0001065843 scopus 로고    scopus 로고
    • Test optics error removal
    • C. J. Evans and R. N. Kestner, “Test optics error removal,” Appl. Opt. 35, 1015-1021 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 1015-1021
    • Evans, C.J.1    Kestner, R.N.2
  • 14
    • 85010108528 scopus 로고    scopus 로고
    • Method and apparatus for absolute measurement of entire surfaces of flats
    • 5,502,56626 March
    • C. Ai, J. Wyant, L.-Z. Shao, and R. E. Parks, “Method and apparatus for absolute measurement of entire surfaces of flats,” U.S. patent 5,502,566 (26 March 1996).
    • (1996) U.S. Patent
    • Ai, C.1    Wyant, J.2    Shao, L.-Z.3    Parks, R.E.4
  • 15
    • 0030399387 scopus 로고    scopus 로고
    • Self-calibration: Reversal, redundancy, error separation, and ‘absolute testing
    • C. J. Evans, R. J. Hocken, and W. T. Estler, “Self-calibration: reversal, redundancy, error separation, and ‘absolute testing,’” Ann. CIRP 45/2, 791-806 (1996).
    • (1996) Ann. CIRP , vol.45 , Issue.2 , pp. 791-806
    • Evans, C.J.1    Hocken, R.J.2    Estler, W.T.3
  • 17
    • 0030701478 scopus 로고    scopus 로고
    • Two-flat method for bi-dimensional measurement of absolute departure from best sphere
    • R. Mercier, M. Lamare, P. Picart, and J. P. Marioge, “Two-flat method for bi-dimensional measurement of absolute departure from best sphere,” Pure Appl. Opt. 6, 117-126 (1997).
    • (1997) Pure Appl. Opt , vol.6 , pp. 117-126
    • Mercier, R.1    Lamare, M.2    Picart, P.3    Marioge, J.P.4
  • 18
    • 58749101388 scopus 로고    scopus 로고
    • Result of the calibration of interferometer transmission flats for the LIGO pathfinder optics
    • H. P. Stahl, ed., Proc. SPIE
    • R. P. Bourgeois, J. Magner, and H. P. Stahl, “Result of the calibration of interferometer transmission flats for the LIGO pathfinder optics,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE 3134, 86-94 (1997).
    • (1997) Optical Manufacturing and Testing II , vol.3134 , pp. 86-94
    • Bourgeois, R.P.1    Magner, J.2    Stahl, H.P.3
  • 19
    • 0000151217 scopus 로고    scopus 로고
    • Pixel-based absolute topography test of three flats
    • R. E. Parks, L. Shao, and C. J. Evans, “Pixel-based absolute topography test of three flats,” Appl. Opt. 37, 5951-5956 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 5951-5956
    • Parks, R.E.1    Shao, L.2    Evans, C.J.3
  • 20
    • 0001537444 scopus 로고
    • Absolute calibration method for laser Twyman-Green wave-front testing interferometers
    • A. E. Jensen, “Absolute calibration method for laser Twyman-Green wave-front testing interferometers,” J. Opt. Soc. Am. 63, 1313 (1973).
    • (1973) J. Opt. Soc. Am. , vol.63 , pp. 1313
    • Jensen, A.E.1
  • 22
    • 0018825958 scopus 로고
    • Interferentielle Absolutprufung von Spharizitatsnormalen
    • K.-E. Elssner, J. Grzanna, and G. Schulz, “Interferentielle Absolutprufung von Spharizitatsnormalen,” Opt. Acta 27, 563-580 (1980).
    • (1980) Opt. Acta , vol.27 , pp. 563-580
    • Elssner, K.-E.1    Grzanna, J.2    Schulz, G.3
  • 24
    • 85010141938 scopus 로고    scopus 로고
    • Method and apparatus for absolutely measuring flat and spherical surfaces with high spatial resolution
    • 6,184,9946 February
    • K. Freischlad, “Method and apparatus for absolutely measuring flat and spherical surfaces with high spatial resolution,” U.S. patent 6,184,994 (6 February 2001).
    • (2001) U.S. Patent
    • Freischlad, K.1
  • 25
    • 84971649875 scopus 로고
    • Fourier description of digital phase-measuring interferometry
    • K. R. Freischlad and C. L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A 7, 542-551 (1990).
    • (1990) J. Opt. Soc. Am. A , vol.7 , pp. 542-551
    • Freischlad, K.R.1    Koliopoulos, C.L.2
  • 27
    • 0000418355 scopus 로고
    • Modal estimation of a wave front from difference measurements using the discrete Fourier transform
    • K. R. Freischlad and C. L. Koliopoulos, “Modal estimation of a wave front from difference measurements using the discrete Fourier transform,” J. Opt. Soc. Am. A 3, 1852-1861 (1986).
    • (1986) J. Opt. Soc. Am. A , vol.3 , pp. 1852-1861
    • Freischlad, K.R.1    Koliopoulos, C.L.2
  • 28
    • 0000720857 scopus 로고
    • Some theoretical aspects of error separation techniques in surface metrology
    • D. J. Whitehouse, “Some theoretical aspects of error separation techniques in surface metrology,” J. Phys. E 9, 531-536 (1976).
    • (1976) J. Phys. E , vol.9 , pp. 531-536
    • Whitehouse, D.J.1
  • 29
    • 0000834058 scopus 로고    scopus 로고
    • Exact wave-front reconstruction from two lateral shearing interferograms
    • C. Elster and I. Weingartner, “Exact wave-front reconstruction from two lateral shearing interferograms,” J. Opt. Soc. Am. A 16, 2281-2285 (1999).
    • (1999) J. Opt. Soc. Am. A , vol.16 , pp. 2281-2285
    • Elster, C.1    Weingartner, I.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.