Measuring form and radius of spheres with interferometry

CIRP Annals - Manufacturing Technology

Volumn 53, Issue 1, 2004, Pages 451-454

  Griesmann, U ^a   Soons, J ^a   Wang, Q ^a   DeBra, D ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Form; Interferometry; Radius

Indexed keywords

ALGORITHMS; INTERFEROMETERS; MIRRORS; OPTICAL BEAM SPLITTERS; PRECISION ENGINEERING; SILICON; SURFACE TREATMENT; VECTORS;

DEVIATION; PRECISION OPTICS;

INTERFEROMETRY;

EID: 3142672850     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)60737-9     Document Type: Article

References (9)

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