Swift heavy ion induced modification in Ti/Si system studied with sub-nanometre resolution

Journal of Physics Condensed Matter

Volumn 19, Issue 3, 2007, Pages

  Rajput, Parasmani ^a   Gupta, Ajay ^a   Reddy, V R ^a   Sathe, Vasant ^a   Avasthi, D K ^b  

^a UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; ION BOMBARDMENT; MATHEMATICAL MODELS; RAMAN SPECTROSCOPY; SILICON; TITANIUM;

ELECTRONIC ENERGY LOSSES; INTERMIXING; RAMAN PEAKS; THERMAL SPIKE MODEL; X RAY FLUORESCENCE;

THIN FILMS;

EID: 33947597870     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/19/3/036221     Document Type: Article

References (33)

1. Mahnke H E 2004 Nucl. Instrum. Methods Phys. Res. B 225 160
2. Bolse W 2003 Radiat. Meas. 36 597
3. Schiwietz G, Luderer E, Xiao G and Grande P L 2001 Nucl. Instrum. Methods Phys. Res. B 175 1
4. Gupta A 2000 Vacuum 58 16
5. Wang Z G, Dufour Ch, Paumier E and Toulemonde M 1994 J. Phys.: Condens. Matter 6 6733
6. Dunlop A, Lesueur D, Legrand P, Dammak H and Dural J 1994 Nucl. Instrum. Methods Phys. Res. B 90 330
7. Gupta A, Rajput P, Saraiya A, Reddy V R, Gupta M, Bernstorff S and Amenitsch H 2005 Phys. Rev. B 72 75436
8. Zwanenburg M J, Peters J F, Bongaerts J H H, de Vries S A, Abernathy D L and van der Veen J F 1999 Phys. Rev. Lett. 82 1696
9. Zwanenburg M J, Bongaerts J H H, Peters J F, Riese D O and van der Veen J F 2000 Phys. Rev. Lett. 85 5154
10. Salditt T, Pfeiffer F, Perzl H, Vix A, Mennicke U, Jarre A, Mazuelas A and Metzger T H 2003 Physica B 336 181
11. Pfeiffer F, Mennicke U and Salditt T 2002 J. Appl. Crystallogr. 35 163
12. Zheludeva S, Kovalchuk M and Novikova N 2001 Spectrochim. Acta B 56 2019
13. Gupta A, Meneghini C, Saraiya A, Principi G and Avasthi D K 2003 Nucl. Instrum. Methods Phys. Res. B 212 458
14. Srivastava S K, Avasthi D K, Assmann W, Wang Z G, Kucal H, Jacquet E, Carstanjen H D and Toulemonde M 2005 Phys. Rev. B 71 193405
15. Fang Y P, Sinha S K, Deckman H W, Hastings J B and Siddons D P 1993 Phys. Rev. Lett. 71 537
16. Nemanich R J, Sigmon T W, Johnson N M, Moyer M D and Lau S S 1981 Laser and Electron-Beam Solid Interactions and Materials Processing ed J F Gibbons, L D Hess and T W Sigmon (New York: North-Holland) p541
17. Tsang J C, Matz R, Yokota Y and Rubloff G W 1984 J. Vac. Sci. Technol. A 2 556
18. Nemanich R J, Fulks R T, Stafford B L and Vander Plas H A 1985 J. Vac. Sci. Technol. A 3 938
19. Tsang J C, Yokota Y, Matz R and Rubloff G 1984 Appl. Phys. Lett. 44 430
20. Parratt L G 1954 Phys. Rev. 95 359
21. Braun C 1997-99 The Reflectivity Tool of Parratt32 Version 1.5 (HMI Berlin)
22. de Boer D K G 1991 Phys. Rev. B 44 498
23. Nevót L and Croce P 1980 Rev. Phys. Appl. 15 761
24. Dev B N, Das A K, Dev S, Schubert D W, Stamm M and Materlik G 2000 Phys. Rev. B 61 8462
25. Avasthi D K, Ghosh S, Ganesa V, Gupta A, Mieskes H D, Huber H and Assmann W 1998 Appl. Phys. A 66 S1137
26. Crespo-Sosa A, Schaaf P, Bolse W, Lieb K P, Gimbel M, Geyer U and Tosello C 1996 Phys. Rev. B 53 14795
27. Ziegler J F, Biersack J P and Littmark U 1985 The Stopping and Ranges of Ions in Solids vol 1 (New York: Pergamon)
28. Bolse W 2006 Nucl. Instrum. Methods Phys. Res. B 244 8
29. Hedler A, Klaumünzer S and Wesch W 2006 Nucl. Instrum. Methods Phys. Res. B 242 85
30. Buchanan J D R, Hase T P A, Tanner B K, Chen P J, Gan L, Powell C J and Egelhoff W F Jr 2002 Phys. Rev. B 66 104427
31. Bigault T, Bocquet F, Labat S, Thomas O and Renevier H 2001 Phys. Rev. B 64 125414
32. Süle P, Menyhrd M, Kótis L, Lbr J and Egelhoff W F Jr 2005 Preprint cond-mat/0510077v1
33. Devolder T 2000 Phys. Rev. B 62 5794