Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer

Microelectronic Engineering

Volumn 86, Issue 11, 2009, Pages 2149-2152

  Hoang, Si Hong ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN thin film; Polycrystalline 3C SiC; SAW properties; Two port SAW resonator

Indexed keywords

AFM; ALN FILMS; ALN THIN FILM; ALN THIN FILMS; C-AXIS ORIENTATIONS; INTERDIGITAL TRANSDUCER; POLYCRYSTALLINE; POLYCRYSTALLINE 3C-SIC; REACTIVE MAGNETRON SPUTTERING; RESONANCE FREQUENCIES; SAW DEVICE; SAW PROPERTIES; SIC BUFFER LAYERS; SIC THIN FILMS; SURFACE ACOUSTIC WAVES; TEMPERATURE RANGE; TEMPERATURE STABILITY; TWO-PORT SAW RESONATOR; XRD;

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; BUFFER LAYERS; RESONANCE; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; THIN FILM DEVICES; THIN FILMS; ULTRASONIC TRANSDUCERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 69749105418     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.02.030     Document Type: Article

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