Silicon MEMS tunable capacitors operating in dielectric fluid

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 871-874

  McCormick, D T ^a,b   Li, Z ^a   Tien, N C ^a  

^a University of California   (United States)

^b Cornell University   (United States)

Author keywords

Capacitance; Capacitors; Damping; Dielectric constant; Electrostatics; Micromechanical devices; Oil insulation; Petroleum; Silicon; Testing

Indexed keywords

ACTUATORS; CAPACITANCE; CAPACITORS; CRUDE OIL; DAMPING; ELECTROSTATICS; MICROSYSTEMS; OIL FILLED TRANSFORMERS; PERMITTIVITY; SILICON; TESTING; TRANSDUCERS;

DIELECTRIC FLUID; MECHANICAL DAMPING; MICRO-MACHINED; MICROMECHANICAL DEVICE; OIL INSULATIONS; SILICON MEMS; TUNABLE CAPACITORS; TUNING RANGES;

SOLID-STATE SENSORS;

EID: 84860961312     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215613     Document Type: Conference Paper

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