Static equivalent circuit model for a capacitive MEMS RF switch

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 166-169

  Tinttunen, T ^a   Veijola, T ^a   Nieminen, H ^b   Ermolov, V ^b   Ryhanen T ^b  

^a AALTO UNIVERSITY   (Finland)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

Capacitive switch; Equivalent circuit; MEMS; RF; Tunable capacitor

Indexed keywords

CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; EQUIVALENT CIRCUITS; NETWORKS (CIRCUITS); POISSON RATIO; SWITCHING; TRANSDUCERS;

BEAM DEFLECTIONS; CAPACITIVE SWITCHES; RADIO FREQUENCY; TUNABLE CAPACITORS;

MICROELECTROMECHANICAL DEVICES;

EID: 4544305558     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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