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Volumn 35, Issue 1, 2010, Pages 314-317

Effect of the Cu underlayer on the optoelectrical properties of ITO/Cu thin films

Author keywords

Copper; ITO; Magnetron sputtering; Optical properties; Resistivity

Indexed keywords

BI-LAYER FILMS; BOTTOM LAYERS; CU UNDERLAYERS; ELECTRICAL RESISTIVITY; FIGURE OF MERIT; INDIUM OXIDE; ITO; ITO FILMS; OPTICAL TRANSMITTANCE; OPTOELECTRICAL PROPERTIES; POLYCARBONATE SUBSTRATES; RESISTIVITY; RF-MAGNETRON SPUTTERING; SINGLE LAYER FILMS; SN-DOPED; SUBSTRATE HEATING;

EID: 69449093279     PISSN: 09601481     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.renene.2009.05.017     Document Type: Article
Times cited : (13)

References (18)
  • 1
    • 21744439176 scopus 로고    scopus 로고
    • Structural properties of indium tin oxide thin films prepared for application in solar cells
    • Gheidar A., and Soleimani E. Structural properties of indium tin oxide thin films prepared for application in solar cells. Mater Res Bull 40 (2005) 1303-1307
    • (2005) Mater Res Bull , vol.40 , pp. 1303-1307
    • Gheidar, A.1    Soleimani, E.2
  • 2
    • 33845209045 scopus 로고    scopus 로고
    • Electrical and optical characteristics of polymer light-emitting devices with surface-treated indium-tin-oxide electrodes
    • You Z., and Dong J. Electrical and optical characteristics of polymer light-emitting devices with surface-treated indium-tin-oxide electrodes. Microelectronics J 38 (2007) 108-113
    • (2007) Microelectronics J , vol.38 , pp. 108-113
    • You, Z.1    Dong, J.2
  • 3
    • 33646487911 scopus 로고    scopus 로고
    • Thin films engineering of indium tin oxide: large area flat panel displays application
    • Betz U., Olsson M., Martly J., and Escola M. Thin films engineering of indium tin oxide: large area flat panel displays application. Surf Coat Technol 200 (2006) 5751-5759
    • (2006) Surf Coat Technol , vol.200 , pp. 5751-5759
    • Betz, U.1    Olsson, M.2    Martly, J.3    Escola, M.4
  • 4
    • 32844461185 scopus 로고    scopus 로고
    • Influence of oxygen in the deposition and annealing atmosphere on the characteristics of ITO thin films prepared by sputtering at room temperature
    • Guillén C., and Herrero J. Influence of oxygen in the deposition and annealing atmosphere on the characteristics of ITO thin films prepared by sputtering at room temperature. Vacuum 80 (2006) 615-620
    • (2006) Vacuum , vol.80 , pp. 615-620
    • Guillén, C.1    Herrero, J.2
  • 5
    • 0041692944 scopus 로고    scopus 로고
    • Deposition of indium tin oxide films on polycarbonate substrates by direct metal ion beam deposition
    • Kim D. Deposition of indium tin oxide films on polycarbonate substrates by direct metal ion beam deposition. Appl Surf Sci 218 (2003) 71-78
    • (2003) Appl Surf Sci , vol.218 , pp. 71-78
    • Kim, D.1
  • 6
    • 1642381067 scopus 로고    scopus 로고
    • Fabrication of thin films of ITO by aerosol CVD
    • Maki K., Komiya N., and Suzuki A. Fabrication of thin films of ITO by aerosol CVD. Thin Solid Films 445 (2003) 224-228
    • (2003) Thin Solid Films , vol.445 , pp. 224-228
    • Maki, K.1    Komiya, N.2    Suzuki, A.3
  • 7
    • 3042856511 scopus 로고    scopus 로고
    • 3 film prepared by DC magnetron sputter type negative metal ion beam deposition
    • 3 film prepared by DC magnetron sputter type negative metal ion beam deposition. Jpn J Appl Phys 43 (2004) 1536-1540
    • (2004) Jpn J Appl Phys , vol.43 , pp. 1536-1540
    • Kim, D.1    Ma, D.2    Lee, N.3
  • 8
    • 0035328721 scopus 로고    scopus 로고
    • Characteristics of indium-tin-oxide/silver/indium-tin-oxide sandwich films and their application to simple-matrix liquid-crystal displays
    • Sawada M., Higuchi M., Kondo S., and Saka H. Characteristics of indium-tin-oxide/silver/indium-tin-oxide sandwich films and their application to simple-matrix liquid-crystal displays. Jpn J Appl Phys 40 (2001) 3332-3336
    • (2001) Jpn J Appl Phys , vol.40 , pp. 3332-3336
    • Sawada, M.1    Higuchi, M.2    Kondo, S.3    Saka, H.4
  • 9
    • 0042598063 scopus 로고    scopus 로고
    • Dependence of the electrical and optical behavior of ITO-silver-ITO multilayers on the silver properties
    • Kloppel A., Riegseis W., Meyer B., Charmann A., Aube C., Stollenwerk J., et al. Dependence of the electrical and optical behavior of ITO-silver-ITO multilayers on the silver properties. Thin Solid Films 365 (2000) 139-146
    • (2000) Thin Solid Films , vol.365 , pp. 139-146
    • Kloppel, A.1    Riegseis, W.2    Meyer, B.3    Charmann, A.4    Aube, C.5    Stollenwerk, J.6
  • 10
    • 0032628037 scopus 로고    scopus 로고
    • ITO/Ag/ITO multilayer films for the application of a very low resistance transparent electrode
    • Choi K., Kim J., Lee Y., and Kim H. ITO/Ag/ITO multilayer films for the application of a very low resistance transparent electrode. Thin Solid Films 341 (1999) 152-155
    • (1999) Thin Solid Films , vol.341 , pp. 152-155
    • Choi, K.1    Kim, J.2    Lee, Y.3    Kim, H.4
  • 11
    • 36849013960 scopus 로고    scopus 로고
    • Electrical and optical study of ITO films on glass and polymer substrates prepared by dc magnetron sputtering type negative metal ion beam deposition
    • You Y., Kim Y., Choi D., Jang H., Lee J., and Kim D. Electrical and optical study of ITO films on glass and polymer substrates prepared by dc magnetron sputtering type negative metal ion beam deposition. Mater Chem Phys 107 (2008) 444-448
    • (2008) Mater Chem Phys , vol.107 , pp. 444-448
    • You, Y.1    Kim, Y.2    Choi, D.3    Jang, H.4    Lee, J.5    Kim, D.6
  • 12
    • 33845231921 scopus 로고    scopus 로고
    • Effects of post-thermal treatment on the properties of RF reactive sputtered ITO films
    • Maurya D. Effects of post-thermal treatment on the properties of RF reactive sputtered ITO films. Microelectronics J 38 (2007) 76-79
    • (2007) Microelectronics J , vol.38 , pp. 76-79
    • Maurya, D.1
  • 13
    • 0032669279 scopus 로고    scopus 로고
    • Low energy rf sputtering system for the deposition of ITO thin films
    • Hoshi Y., and Ohki R. Low energy rf sputtering system for the deposition of ITO thin films. Electrochim Acta 44 (1999) 3927-3932
    • (1999) Electrochim Acta , vol.44 , pp. 3927-3932
    • Hoshi, Y.1    Ohki, R.2
  • 14
    • 0016992850 scopus 로고
    • New figure of merit for transparent conductors
    • Haacke G. New figure of merit for transparent conductors. J Appl Phys 147 (1976) 4086-4089
    • (1976) J Appl Phys , vol.147 , pp. 4086-4089
    • Haacke, G.1
  • 15
    • 36449006943 scopus 로고    scopus 로고
    • On the initial growth of indium tin oxide on glass
    • Sun X., Huang H., and Kwok H. On the initial growth of indium tin oxide on glass. Appl Phys Lett 68 (1996) 2663-2665
    • (1996) Appl Phys Lett , vol.68 , pp. 2663-2665
    • Sun, X.1    Huang, H.2    Kwok, H.3
  • 16
    • 0042524650 scopus 로고    scopus 로고
    • Effects of thermal treatment on the electrical and optical properties of silver-based indium tin oxide/metal/indium tin oxide structures
    • Jung Y., Choi Y., Lee H., and Lee D. Effects of thermal treatment on the electrical and optical properties of silver-based indium tin oxide/metal/indium tin oxide structures. Thin Solid Films 440 (2003) 278-284
    • (2003) Thin Solid Films , vol.440 , pp. 278-284
    • Jung, Y.1    Choi, Y.2    Lee, H.3    Lee, D.4
  • 17
    • 52949097627 scopus 로고    scopus 로고
    • The effects of surface roughness and nanostructure on the properties of indium tin oxide (ITO) designated for novel optoelectronic devices fabrication
    • Kavei G., and Mohammadi G. The effects of surface roughness and nanostructure on the properties of indium tin oxide (ITO) designated for novel optoelectronic devices fabrication. J Mater Proces Technol 208 (2008) 514-519
    • (2008) J Mater Proces Technol , vol.208 , pp. 514-519
    • Kavei, G.1    Mohammadi, G.2
  • 18
    • 59049083088 scopus 로고    scopus 로고
    • Fabrication and characterization of Pt intermediate transparent and conducting ITO/Pt/ITO multilayer films
    • Choi J., Lee J., Park J., Chae J., Park H., and Kim D. Fabrication and characterization of Pt intermediate transparent and conducting ITO/Pt/ITO multilayer films. J Phys Chem Solids 70 (2009) 272-275
    • (2009) J Phys Chem Solids , vol.70 , pp. 272-275
    • Choi, J.1    Lee, J.2    Park, J.3    Chae, J.4    Park, H.5    Kim, D.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.