Deposition of indium tin oxide films on polycarbonate substrates by direct metal ion beam deposition

Applied Surface Science

Volumn 218, Issue 1-4, 2003, Pages 71-78

  Kim, Daeil ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Atomic force microscopy (AFM); Indium tin oxide (ITO); Optical property; X ray photoelectron spectroscopy (XPS)

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; HEATING; INDIUM COMPOUNDS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION BOMBARDMENT; LIGHT TRANSMISSION; MORPHOLOGY; OPTICAL PROPERTIES; OXIDATION; POLYCARBONATES; SURFACE PHENOMENA; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM ENERGY;

THIN FILMS;

EID: 0041692944     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00542-7     Document Type: Article

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