Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films

Microelectronics Journal

Volumn 38, Issue 1, 2007, Pages 76-79

  Maurya, D K ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Annealing; ITO; Optical transmission

Indexed keywords

HEAT TREATMENT; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

ALLOY TARGET; INDIUM TIN OXIDE (ITO); REACTIVE GAS; TRANSMITTANCE;

THIN FILMS;

EID: 33845231921     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.09.009     Document Type: Article

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