Room-temperature migration and interaction of ion beam generated defects in crystalline silicon

Applied Physics Letters

Volumn 68, Issue 24, 1996, Pages 3422-3424

  Privitera, Vittorio ^a   Coffa, Salvatore ^a   Priolo, Francesco ^b   Larsen, Kim Kyllesbech ^b   Mannino, Giovanni ^b  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006353927     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115780     Document Type: Article

References (14)

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