Observing hydrogen silsesquioxane cross-linking with broadband CARS

Journal of Raman Spectroscopy

Volumn 40, Issue 7, 2009, Pages 770-774

  Caster, Allison G ^a   Kowarik, Stefan ^a   Schwartzberg, Adam M ^a   Nicolet, Olivier ^b   Lim, Sang Hyun ^c   Leone, Stephen R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NESTLÉ RESEARCH CENTER   (Switzerland)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

CARS; Coherent anti Stokes Raman scattering; Hydrogen silsesquioxane; Photolithography; POSS

Indexed keywords

COHERENT SCATTERING; CROSSLINKING; HYDROGEN; INFRARED DEVICES; PHOTORESISTS; RAMAN SCATTERING;

COHERENT ANTI STOKES RAMAN SCATTERING; COHERENT ANTI-STOKES RAMAN SCATTERING MICROSCOPY; CROSS LINKING; HYDROGEN SILSESQUIOXANE; MEASUREMENTS OF; PHOTORESIST MATERIALS; POSS; RAMAN BANDS; REAL TIME MEASUREMENTS; SITU CROSS-LINKING;

RAMAN SPECTROSCOPY;

EID: 69349104003     PISSN: 03770486     EISSN: 10974555     Source Type: Journal    
DOI: 10.1002/jrs.2190     Document Type: Article

References (27)

1. N. Clark, A. Vanderslice, R. Grove, R. R. Krchnavek, J.Vac. Sci. Technol., B 2006, 24, 3073.
2. M. J. Loboda, C. M. Grove, R. F. Schneider, J. Electrochem. Soc. 1998, 145, 2861.
3. M. J. Loboda, G. A. Toskey, Solid State Technol. 1998, 41, 99.
4. H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, K. Kurihara, J. Vac. Sci. Technol., B 1998, 16, 69.
5. D. L. Olynick, J. A. Liddle, A. V. Tivanski, M. K. Gilles, T. Tyliszczak, F. Salmassi, K. Liang, S. R. Leone, J. Vac. Sci. Technol., B 2006, 24, 3048.
6. M. Peuker, M. H. Lim, H. I. Smith, R. Morton, A. K. van Langen-Suurling, J. Romijn, E. van der Drift, F. van Delft, Microelectron. Eng. 2002, 61-2, 803.
7. M. G. Albrecht, C. Blanchette, J. Electrochem. Soc. 1998, 145, 4019.
8. V. Belot, R. Corriu, D. Leclercq, P. H. Mutin, A. Vioux, Chem. Mater. 1991, 3, 127.
9. W. C. Liu, C. C. Yang, W. C. Chen, B. T. Dai, M. S. Tsai, J. Non-Cryst. Solids 2002, 311, 233.
10. C. C. Yang, W. C. Chen, J. Mater. Chem. 2002, 12, 1138.
11. Y. K. Siew, G. Sarkar, X. Hu, J. Hui, A. See, C. T. Chua, J. Electrochem. Soc. 2000, 147, 335.
12. A. Zumbusch, G. R. Holtom, X. S. Xie, Phys. Rev. Lett. 1999, 82, 4142.
13. J. H. Wang, W. J. Chen, T. C. Chang, P. T. Liu, S. L. Cheng, J. Y. Lin, L. J. Chen, J. Electrochem. Soc. 2003, 150, F141.
14. C. L. Evans, E. O. Potma, M. Puoris'haag, D. Cote, C. P. Lin, X. S. Xie, Proc. Natl. Acad. Sci. U.S.A. 2005, 102, 16807.
15. M. Müller, A. Zumbusch, ChemPhysChem 2007, 8, 2157.
16. A. Volkmer, J. Phys. D: Appl. Phys. 2005, 38, R59.
17. N. Dudovich, D. Oron, Y. Silberberg, Nature 2002, 418, 512.
18. A. G. Caster, S. H. Lim, O. Nicolet, S. R. Leone, Spectroscopy 2006, 21, 27.
19. S. H. Lim, A. G. Caster, S. R. Leone, Phys. Rev. A 2005, 72, 041803.
20. S. H. Lim, A. G. Caster, S. R. Leone, Opt. Lett. 2007, 32, 1332.
21. T. W. Kee, M. T. Cicerone, Opt. Lett. 2004, 29, 2701.
22. H. Kano, H. Hamaguchi, J. Raman Spectrosc. 2006, 37, 411.
23. B. von Vacano, L. Meyer, M. Motzkus, J. Raman Spectrosc. 2007, 38, 916.
24. L. Lepetit, G. Cheriaux, M. Joffre, J. Opt. Soc. Am. B 1995, 12, 2467.
25. P. Bornhauser, G. Calzaferri, J. Phys. Chem. 1996, 100, 2035.
26. H. C. Liou, J. Pretzer, Thin Solid Films 1998, 335, 186.
27. B. C. Chen, S. H. Lim, J. Phys. Chem. B 2008, 112, 3653.