Residual stresses and mechanical properties of a ZnO pyroelectric sensor

Theoretical and Applied Fracture Mechanics

Volumn 52, Issue 1, 2009, Pages 1-6

  Hsiao, C C ^a   Hu, Y C ^b   Chang, R C ^c   Chao, C K ^d  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL ILAN UNIVERSITY   (Taiwan)

^c ST JOHN'S UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Film stress; Pyroelectric; Sensor; Thin film; ZnO

Indexed keywords

ANALYTICAL MODEL; COMMON FEATURES; FILM LAYERS; FILM STRESS; GRAIN MORPHOLOGIES; MECHANICAL PROPERTIES TESTING; MULTILAYER COMPOSITE FILMS; PYROELECTRIC; PYROELECTRIC SENSORS; RESIDUAL STRESS DISTRIBUTIONS; THIN-FILM DEPOSITIONS; THIN-FILM TECHNOLOGY; VOLTAGE RESPONSIVITY; YOUNG'S MODULUS; ZNO;

COMPOSITE FILMS; DEPOSITION; ELECTRIC POTENTIAL; MECHANICAL PROPERTIES; MOLECULAR BEAM EPITAXY; MULTILAYER FILMS; MULTILAYERS; PYROELECTRICITY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; STRENGTH OF MATERIALS; STRESS CONCENTRATION; THIN FILM DEVICES; ZINC OXIDE;

FILM PREPARATION;

EID: 69249205377     PISSN: 01678442     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tafmec.2009.06.002     Document Type: Article

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