메뉴 건너뛰기




Volumn 52, Issue 1, 2009, Pages 1-6

Residual stresses and mechanical properties of a ZnO pyroelectric sensor

Author keywords

Film stress; Pyroelectric; Sensor; Thin film; ZnO

Indexed keywords

ANALYTICAL MODEL; COMMON FEATURES; FILM LAYERS; FILM STRESS; GRAIN MORPHOLOGIES; MECHANICAL PROPERTIES TESTING; MULTILAYER COMPOSITE FILMS; PYROELECTRIC; PYROELECTRIC SENSORS; RESIDUAL STRESS DISTRIBUTIONS; THIN-FILM DEPOSITIONS; THIN-FILM TECHNOLOGY; VOLTAGE RESPONSIVITY; YOUNG'S MODULUS; ZNO;

EID: 69249205377     PISSN: 01678442     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tafmec.2009.06.002     Document Type: Article
Times cited : (12)

References (14)
  • 1
    • 0032520306 scopus 로고    scopus 로고
    • An integrated pyroelectric infrared sensor with a PZT thin film
    • Chang C.C., and Tang C.S. An integrated pyroelectric infrared sensor with a PZT thin film. Sens. Actuators A 65 (1998) 171
    • (1998) Sens. Actuators A , vol.65 , pp. 171
    • Chang, C.C.1    Tang, C.S.2
  • 3
    • 0037186173 scopus 로고    scopus 로고
    • Pyroelectric sensor array for in-line monitoring of infrared laser
    • Chong N., Chan H.L.W., and Choy C.L. Pyroelectric sensor array for in-line monitoring of infrared laser. Sens. Actuators A 96 (2002) 231
    • (2002) Sens. Actuators A , vol.96 , pp. 231
    • Chong, N.1    Chan, H.L.W.2    Choy, C.L.3
  • 4
    • 0035882115 scopus 로고    scopus 로고
    • Measurements of residual stress in the thin film micro-gas sensors containing metallic layers
    • Kim Y., and Choo S.H. Measurements of residual stress in the thin film micro-gas sensors containing metallic layers. Thin Solid Films 394 (2001) 284
    • (2001) Thin Solid Films , vol.394 , pp. 284
    • Kim, Y.1    Choo, S.H.2
  • 5
    • 0031199186 scopus 로고    scopus 로고
    • An analytical model for predicting residual stresses in progressively deposited coatings Part 1: planar geometry
    • Tsui Y.C., and Clyne T.W. An analytical model for predicting residual stresses in progressively deposited coatings Part 1: planar geometry. Thin Solid Films 306 (1997) 23
    • (1997) Thin Solid Films , vol.306 , pp. 23
    • Tsui, Y.C.1    Clyne, T.W.2
  • 6
    • 4544352466 scopus 로고    scopus 로고
    • The nanoindentation behaviour of hard and soft films on silicon substrates
    • Beegan D., Chowdhury S., and Laugier M.T. The nanoindentation behaviour of hard and soft films on silicon substrates. Thin Solid Films 466 (2004) 167
    • (2004) Thin Solid Films , vol.466 , pp. 167
    • Beegan, D.1    Chowdhury, S.2    Laugier, M.T.3
  • 7
    • 0040633110 scopus 로고    scopus 로고
    • Measurement of mechanical properties by ultra-low load indentation
    • Pharr G.M. Measurement of mechanical properties by ultra-low load indentation. Mater. Sci. Eng. A 253 (1998) 151
    • (1998) Mater. Sci. Eng. A , vol.253 , pp. 151
    • Pharr, G.M.1
  • 8
    • 0026875935 scopus 로고
    • Improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • Oliver W.C., and Pharr G.M. Improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7 (1992) 1564
    • (1992) J. Mater. Res. , vol.7 , pp. 1564
    • Oliver, W.C.1    Pharr, G.M.2
  • 9
    • 40849141239 scopus 로고    scopus 로고
    • Fabrication of a ZnO pyroelectric sensor
    • Hsiao C.C., Huang K.Y., and Hu Y.C. Fabrication of a ZnO pyroelectric sensor. Sensors 8 (2008) 185
    • (2008) Sensors , vol.8 , pp. 185
    • Hsiao, C.C.1    Huang, K.Y.2    Hu, Y.C.3
  • 10
    • 84974183414 scopus 로고
    • A method for interpreting the data from depth-sensing indentation instruments
    • Doerner M.F., and Nix W.D. A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1 (1986) 601
    • (1986) J. Mater. Res. , vol.1 , pp. 601
    • Doerner, M.F.1    Nix, W.D.2
  • 11
    • 0035521978 scopus 로고    scopus 로고
    • Substrate effects on indentation plastic zone development in thin soft films
    • Kramer D.E., Volinsky A.A., Moody N.R., and Gerberich W.W. Substrate effects on indentation plastic zone development in thin soft films. J. Mater. Res. 16 (2001) 3150
    • (2001) J. Mater. Res. , vol.16 , pp. 3150
    • Kramer, D.E.1    Volinsky, A.A.2    Moody, N.R.3    Gerberich, W.W.4
  • 14
    • 0348231831 scopus 로고    scopus 로고
    • Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering
    • Kim N.H., and Kim H.W. Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering. Mater. Lett. 58 (2004) 938
    • (2004) Mater. Lett. , vol.58 , pp. 938
    • Kim, N.H.1    Kim, H.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.