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Sensors and Actuators, A: Physical
Volumn 65, Issue 2-3, 1998, Pages 171-174
An integrated pyroelectric infrared sensor with a PZT thin film
Author keywords

Infrared sensors; JFET; Lead zirconate titanate (PZT); Pyroelectric; Specific detectivity; Thin films; Voltage sensitivity
Indexed keywords

FREQUENCY MODULATION; JUNCTION GATE FIELD EFFECT TRANSISTORS; LEAD COMPOUNDS; PYROELECTRICITY; SEMICONDUCTING SILICON; SENSORS; SUBSTRATES; THIN FILMS;
EID: 0032520306     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01663-4     Document Type: Article
Times cited : (50)
References (10)
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  • 2
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.