Measurements of residual stress in the thin film micro-gas sensors containing metallic layers

Thin Solid Films

Volumn 394, Issue 1-2, 2001, Pages 283-290

  Kim, Youngman ^a   Choo, Sung Ho ^a  

^a Chonnam National University   (South Korea)

Author keywords

Laser scanning method; Pt thin film; Residual stress; SnO2 gas sensor; Thermal cycling; Thermal stress

Indexed keywords

CHEMICAL SENSORS; GAS ADSORPTION; HEAT TREATMENT; MICROSTRUCTURE; PLATINUM; RESIDUAL STRESSES; THERMAL CYCLING;

METALLIC LAYERS; MICRO-GAS SENSORS;

THIN FILMS;

EID: 0035882115     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(01)01137-3     Document Type: Article

References (11)