Fabrication of a ZnO pyroelectric sensor

Sensors

Volumn 8, Issue 1, 2008, Pages 185-192

  Hsiao, Chun Ching ^a   Huang, Kuo Yi ^b   Hu, Yuh Chung ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b HUAFAN UNIVERSITY   (Taiwan)

Author keywords

Pyroelectric sensor; Thin film deposition; ZnO

Indexed keywords

DEPOSITION; METALLIC FILMS; NICKEL; NICKEL COATINGS; THIN FILMS;

MODULATING FREQUENCIES; NICKEL FILM; PREFERRED ORIENTATIONS; PYROELECTRIC SENSORS; RADIO-FREQUENCY SPUTTERING; SPUTTERING PROCESS; THIN-FILM DEPOSITIONS; VOLTAGE RESPONSIVITY;

ZINC OXIDE;

EID: 40849141239     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s8010185     Document Type: Article

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