Partial-electroded ZnO pyroelectric sensors for responsivity improvement

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 18-24

  Wei, C S ^a   Lin, Y Y ^a   Hu, Y C ^b   Wu, C W ^c,d   Shih, C K ^a   Huang, C T ^a,e   Chang, S H ^{a,f,g,h,i,j,k,l,m}  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b HUAFAN UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^d National Taiwan Ocean University ^*

^e TAIWAN TEXTILE RESEARCH INSTITUTE   (Taiwan)

^f Mechanical Engineering Department   (Taiwan)

^g Nano Electro Mechanical Systems (NEMS) Research Center   (Taiwan)

^h Center for Nano Science and Technology   (Taiwan)

ⁱ IEEE   (Taiwan)

^j ASME   (Japan)

^k Chinese Society of Mechanical Engineers (CSME)   (China)

^l Chinese Society of Mechanism and Machine Theory   (China)

^m Nanotechnology and Micro System Association   (Taiwan)

more..

Author keywords

Frequency response; Partially covered electrode; Pyroelectric sensor; ZnO

Indexed keywords

FULLY COVERED ELECTRODE (FCE); PARTIALLY COVERED ELECTRODE; PYROELECTRIC SENSOR;

ELECTRODES; FREQUENCY RESPONSE; LASER BEAMS; PYROELECTRICITY; SILICA; ZINC OXIDE;

SENSORS;

EID: 33645152394     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.044     Document Type: Article

References (18)

1. P.I. Oden, E.A. Wachter, T. Thundat, and R.J. Warmack Optical and infrared detection using microcantilevers SPIE 2744 1966 345 354
2. M. Kohil, C. Wuethrich, K. Brooks, B. Willing, M. Forster, P. Mmuralt, N. Setter, and P. Ryser Pyroelectric thin-film sensor array Sens. Actuators A 60 1-3 1997 147 153
3. 3, and ZnO thin films J. Appl. Phys. 70 10 1991 5538 5543
4. D. Setiadi, and P.P.L. Regtien A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments Sens. Actuators A 46-47 1995 408 412
5. J.S. Ko, W. Liu, and W. Zhu Substrate effects on the properties of pyroelectric thin film IR detector Sens. Actuators A 93 2001 117 122
6. U. Dillner Thermal simulation and realization of micromachined thermal sensor arrays Proceedings of 5th NEXUSPAN Workshop on Thermal Aspects in Microsystem Technology Budpest 1998 133 141
7. 3 ferroelectric thin films Ferroelectrics 118 1991 325 342
8. J.R. Choi, and D. Polla Integration of microsensors in GaAs MESFET process J. Micromech. Microeng. 3 1993 60 64
9. C.C. Chang, and C.S. Tang An integrated pyroelectric infrared sensor with PZT thin-film Sens. Actuators A 65 1998 171 174
10. K. No, C.G. Choi, D.S. Yoon, T.H. Sung, Y.C. Kim, I.S. Jeong, and W.J. Lee Pyroelectric properties of sol-gel derived lanthanum modified lead titanate thin films Jpn. J. Appl. Phys. 35 1996 2731 2733
11. R.W. Whatmore Pyroelectric devices and materials Rep. Prog. Phys. 49 1986 1335 1386
12. D. Lienhard, F. Heepmann, and B. Ploss Thin nickel films as absorbers in pyroelectric sensor arrays Microelectron. Eng. 29 1995 101 104
13. N. Chong, H.L.W. Chan, and C.L. Choy Pyroelectric sensor array for in-line monitoring of infrared laser Sens. Actuators A 96 2002 231 238
14. G.De. Cicco, B. Morten, D. Dalmonego, and M. Prudenziati Pyroelectricity of PZT-based thick-films Sens. Actuators 76 1999 409 415
15. C.S. Feng, and P.M. Xu The detection mechanism of LiTaO type II pyroelectric detectors. I. The primary and secondary pyroelectric effects Infrared Phys. Technol. 40 1999 61 70
16. J.D. Zook, and S.T. Liu Pyroelectric effects in thin film J. Appl. Phys. 49 8 1978 4604 4606
17. R.E.I. Schropp, C.E. Matovich, P.K. Bhat, and A. Madan Transparent and conductive thin films of ZnO for photovoltaic applications prepared by rf magnetron sputtering Photovoltaic Specialists Conference 1998 1988 273 276
18. Y. Chen, H.L.W. Chan, N.M. Hui, Y.W. Wong, and C.L. Choy Response of nanocomposite pyroelectric detectors Sens. Actuators A 69 1998 156 165