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Journal of Materials Research

Volumn 16, Issue 11, 2001, Pages 3150-3157

Substrate effects on indentation plastic zone development in thin soft films

(4) Kramer, D E a Volinsky, A A b Moody, N R c Gerberich, W W d

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b MOTOROLA INC (United States)

c SANDIA NATIONAL LABORATORIES (United States)

d University of Minnesota (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARDNESS TESTING; INDENTATION; MATHEMATICAL MODELS; SAPPHIRE; SILICON; SUBSTRATES; THICKNESS CONTROL;

THIN SOFT FILMS;

THIN FILMS;

EID: 0035521978 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0434 Document Type: Article

Times cited : (83)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.