Tetragonal distortion of InN thin films by RBS/Channeling

Chinese Physics Letters

Volumn 26, Issue 8, 2009, Pages

  Ding, Zhi Bo ^a,b   Wu, Wei ^a   Wang, Kun ^a   Fa, Tao ^a   Yao, Shu De ^a  

^a PEKING UNIVERSITY   (China)

^b State Environmental Protection Administration   (China)

Author keywords

[No Author keywords available]

Indexed keywords

III-V SEMICONDUCTORS; NITROGEN COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS;

CHANNELING SPECTROMETRY; CRYSTALLINE QUALITY; INN THIN FILMS; NON DESTRUCTIVE; RBS-CHANNELING; RUTHERFORD BACKSCATTERING AND CHANNELINGS; RUTHERFORD BACKSCATTERING SPECTROMETRY; TETRAGONAL DISTORTION;

INDIUM COMPOUNDS;

EID: 68949211239     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/8/086111     Document Type: Article

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